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A mesopump having a plurality of elementary cells and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable d

A mesopump having a plurality of elementary cells and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable diaphragm is mounted with its major portion located in the cavity between the electrodes so that the diaphragm deflects toward the upper or lower surfaces to conform thereto. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The lateral conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells are interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into and out of the body. The preferred mesopump includes sets of three cell groups so that fluid enters a first cell from a source of fluid, is expelled to a second cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.

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[ I claim:] [1.] A mesopump having a plurality of elementary cells, each of said cells comprising:a body forming an electrode cavity having an upper electrode and a lower electrode, each of said electrodes having a curved surface facing toward the curved surface of the other electrode to define said

[ I claim:] [1.] A mesopump having a plurality of elementary cells, each of said cells comprising:a body forming an electrode cavity having an upper electrode and a lower electrode, each of said electrodes having a curved surface facing toward the curved surface of the other electrode to define said cavity, said body including electrical activation means for selectively energizing said electrodes;a bistable diaphragm mounted and grounded in said body and having a major portion located in said cavity between said curved surfaces, said diaphragm being adapted to deflect toward said upper and lower electrode curved surfaces to conform thereto;lateral conduit means in said body forming an end conduit, said lateral conduit means being operably connected to the portion of said diaphragm mounted in said body and positioned to be opened and closed by movement of said diaphragm for controlling flow of fluid through said end conduit;vertical conduit means operatively connected to at least one curved surface of an electrode cavity for controlling flow of fluid there through by movement of said diaphragm into and out of contact with said vertical conduit means; andinterconnecting conduit means for connecting said cell to said plurality of cells to form said mesopump;whereby activation of said electrodes causes movement of said diaphragm between said curved surfaces of said electrodes to move fluid into and out of said body.