[특허]Method and apparatus for dispatching lots in a factory

[미국특허] Method and apparatus for dispatching lots in a factory 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G06F-019/00 G06G-007/66
출원번호	US-0859952 (1997-05-21)
발명자 / 주소	Yang Terry H.,TWX Chu Harry L.,TWX
출원인 / 주소	Taiwan Semiconductor Manufacturing Co., Ltd., TWX
대리인 / 주소	Christensen, O'Connor, Johnson & Kindness PLLC
인용정보	피인용 횟수 : 47 인용 특허 : 0

초록 ▼

A lot dispatching method and apparatus for dispatching WIP lots in the manufacture of semiconductor integrated circuits includes determining an average process time (T) and average number of lots per batch (a) of a succeeding process, and determining allowable lots (k) of a preceding process. The allowable lots (k) is equal to the preceding lots (m) undergoing the preceding process to the extent that the sum of (m) and the lots waiting to undergo the succeeding process (n) is not greater than the maximum batch size of the succeeding process. An allowable waiting time is then determined in accordance with a lot waiting rule, where the allowable waiting time represents the average time for processing the number of additional lots to be gained by waiting for the preceding process to complete. The allowable waiting time is determined by the equation k(T/a). If the expected waiting time for the preceding process to complete is greater than the determined allowable waiting time, the WIP lots (n) are immediately processed in the succeeding process; otherwise, the (n) WIP lots are not dispatched until the allowable lots (k) of the preceding process arrive, which are then combined into a single batch and dispatched into the succeeding process.

대표청구항 ▼

[ What is claimed is:] [20.] Apparatus for dispatching work in process (WIP) lots in a factory, said apparatus comprising:a succeeding tool configured to perform a succeeding process on a batch of lots, the succeeding tool having a maximum batch size B, an average process time T and an average batch size a;a preceding tool configured to perform a preceding process on a batch of lots, wherein lots processed by the preceding tool are next processed by the succeeding tool; anda control means, coupled to the succeeding tool and the preceding tool, for dispatching lots into the succeeding tool according to a lot waiting rule, the control means comprising:means for determining an average process time of the succeeding tool;means for determining an average number of lots per batch of the succeeding tool;means for determining an allowable number k of additional lots for the succeeding tool, wherein when the succeeding tool becomes available to process lots,the succeeding tool has n pending lots waiting to be dispatched into the succeeding tool,the preceding tool has m lots being processed, the m lots being expected to arrive at the succeeding tool after an expected waiting time, andthe allowable lots k being equal to m when (n+m) does not exceed B and being equal to (B-n) when (n+m) exceeds B;means for determining an allowable waiting time, wherein the allowable waiting time is proportional to k and T and inversely proportional to a; andmeans for comparing the allowable waiting time to the expected waiting time, wherein the control means dispatches the n pending lots into the succeeding tool without waiting for the allowable lots when the expected waiting time exceeds the maximum waiting time and dispatches a batch including the n pending lots and the k allowable lots into the succeeding tool when the k allowable lots arrive at the succeeding machine.

이 특허를 인용한 특허 (47) 인용/피인용 타임라인 분석

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[미국특허] Method and apparatus for dispatching lots in a factory 원문보기

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