[특허]Substrate transport apparatus

[미국특허] Substrate transport apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65G-001/06 B65G-047/24
출원번호	US-0958872 (1997-10-27)
우선권정보	JP-0086579 (1995-04-12)
발명자 / 주소	Nishi Kenji,JPX
출원인 / 주소	Nikon Corporation, JPX
대리인 / 주소	Armstrong, Westerman, Hattori, McLeland and Naughton
인용정보	피인용 횟수 : 24 인용 특허 : 0

초록 ▼

A wafer cassette for storing a wafer is provided vertically above (direction Z) a transport path for a wafer which is carried by a robot arm driven by a drive mechanism to move along a transport guide extending from a wafer inlet from a wafer outlet. The wafer cassette is disposed at a position between the inlet and a pre-alignment mechanism. The wafer cassette is supported by a cassette retaining base. Drive members driven by a wafer up-down mechanism are fixed to both ends of the cassette retaining base which face opposite each other in a direction perpendicular to the transport path. Thus, the wafer cassette is vertically moved by the wafer up-down mechanism to deliver a wafer between the robot arm and the wafer cassette.

대표청구항 ▼

[ What is claimed is:] [4.] An exposure apparatus comprising:a substrate stage having a support surface on which a substrate is supported in a position at which the substrate is irradiated with exposure light;a transport system which transports said substrate from a transport initiation position to said support surface, said transport system being provided with a supporting mechanism which supports the substrate in a generally vertical position in at least a part of the way from said transport initiation position to said support surface; anda pre-alignment mechanism provided in a path of transportation of the substrate from said transport initiation position to said support surface to pre-align said substrate, wherein said supporting mechanism supports the substrate in an upright position with respect to the plane of said support surface during transportation of the substrate from said transport initiation position to said pre-alignment mechanism.

이 특허를 인용한 특허 (24) 인용/피인용 타임라인 분석

Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
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Park, Tae-Sin; Lee, Bong-Ki, Exposure apparatus and exposure method for use in forming a pattern of a semiconductor device.
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Lowrance, Robert B.; Englhardt, Eric Andrew; Rice, Michael R.; Shah, Vinay; Koshti, Sushant S.; Hudgens, Jeffrey C., Methods and apparatus for a band to band transfer module.
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Greene, Jr., Daniel Lawson; Sinicki, Ron; Woolley, Kurt, Reticle stop block apparatus and method.
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Greene, Jr., Daniel Lawson; Sinicki, Ron; Woolley, Kurt, Reticle stop block apparatus and method.
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Takano, Shin, Semiconductor manufacturing apparatus and device manufacturing method.
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Tateyama Kiyohisa,JPX, Substrate conveying device and substrate conveying method.
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Tateyama Kiyohisa,JPX, Substrate conveying device and substrate conveying method.
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Birkner, Andreas; Hiltawski, Knut; Urban, Karsten; Wienecke, Joachim, Substrate conveying module and system made up of substrate conveying module and workstation.
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Masayuki Toda JP; Masaki Kusuhara JP; Masaru Umeda JP; Michio Yagai JP, Substrate transfer device and operating method thereof.
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Nakagawa, Masayuki, Transport device.
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Minoru Soraoka JP; Ken Yoshioka JP; Yoshinao Kawasaki JP, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
상세보기
Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka,Minoru; Yoshioka,Ken; Kawasaki,Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Soraoka,Minoru; Yoshioka,Ken; Kawasaki,Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
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Nering Eric A., Wafer positioning device with storage capability.
상세보기
Nering, Eric A., Wafer positioning device with storage capability.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Substrate transport apparatus 원문보기