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Uncooled amorphous YBaCuO thin film infrared detector 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/058
출원번호 US-0086343 (1998-05-29)
발명자 / 주소
  • Butler Donald P.
  • Celik-Butler Zeynep
  • Shan Pao-Chuan,TWX
  • Jahanzeb Agha
출원인 / 주소
  • Research Corporation Technologies, Inc.
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 19  인용 특허 : 22

초록

A thermal detector includes a transducer layer of semiconducting yttrium barium copper oxide which is sensitive at room temperature to radiation and provides detection of infrared radiation. In a gate-insulated transistor embodiment, a layer of ferroelectric semiconducting yttrium barium copper oxid

대표청구항

[ What is claimed as new and desired to be secured by letters patent of the United States is:] [17.] A pyroelectric detector comprising:a semiconducting transducer layer of amorphous oxide formed from (1) at least one member selected from the group consisting of barium, strontium, and calcium, (2) a

이 특허에 인용된 특허 (22)

  1. Sasaki Nobuo (Kawasaki JPX), Active device having an oxide superconductor and a fabrication process thereof.
  2. Hu Qing (Boston MA), Antenna-coupled high Tc superconducting microbolometer.
  3. Hanson Charles M. (Richardson TX), Capacitive bolometer and method for detecting infrared radiation.
  4. Hanson Charles M. (Richardson TX), Capacitive bolometer with improved responsivity.
  5. Ramesh Ramamoorthy (Tinton Falls NJ), Cubic metal oxide thin film epitaxially grown on silicon.
  6. Shappirio Joel R. (Monmouth NJ) Aucoin Thomas R. (Monmouth NJ) Finnegan John J. (Atlantic Highlands NJ), High temperature superconducting thin film structure and method of making.
  7. Hornbeck Larry J. (Van Alstyne TX), Infrared detector.
  8. Liu Michael S. (Bloomington MN) Haviland Jeffrey S. (Plymouth MN) Yue Cheisan J. (Roseville MN), Integrated infrared sensitive bolometers.
  9. Desu Seshu B. (Blacksburg VA) Tao Wei (Blacksburg VA) Peng Chien H. (Blacksburg VA) Li Tingkai (Blacksburg VA) Zhu Yongfei (Blacksburg VA), Metalorganic chemical vapor deposition of layered structure oxides.
  10. Allen Silas J. (Summit NJ) Krchnavek Robert R. (Bridgewater NJ), Method for fabricating integrated microelectronic assembly comprising photoconductor with oxide superconducting leads.
  11. Keenan William F. (Plano TX), Method for forming uncooled infrared detector.
  12. Hartmann, Rolf; Krah, Albrecht; Egle, Hilda; Ziegler, Rudolf, Method of making a bolometric radiation detector.
  13. Cole Barrett E. (Bloomington MN), Microstructure design for high IR sensitivity.
  14. Ramesh Ramamoorthy (Tinton Falls NJ), Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes.
  15. Liddiard Kevin C. (Adelaide AUX), Semiconductor film bolometer thermal infrared detector.
  16. Connell George A. N. (Cupertino CA) Fenner David B. (Menlo Park CA) Boyce James B. (Los Altos CA) Fork David K. (Palo Alto CA), Silicon substrate having an epitaxial superconducting layer thereon and method of making same.
  17. Kapitulnik Aharon (Palo Alto CA), Superconducting bolometer.
  18. Bang Christopher A. (Cambridge MA) Flik Markus I. (Boston MA) Schmidt Martin A. (Reading MA) Zhang Zhoumin (Cambridge MA), Superconducting detector and method of making same.
  19. Fenner David B. (Simsbury CT) Carangelo Robert M. (Glastonbury CT), Superconducting detector assembly and apparatus utilizing same.
  20. Ennulat Reinhard D. (Huntington Beach CA) Pommerrenig Dieter (Laguna Niguel CA), Uncooled high resolution infrared imaging plane.
  21. Keenan William F. (Plano TX), Uncooled infrared detector and method for forming the same.
  22. Kruse ; Jr. Paul W. (Edina MN), Wavelength tunable infrared detector based upon super-schottky or superconductor-insulator-superconductor structures emp.

이 특허를 인용한 특허 (19)

  1. Bell,Alan G.; Bruce,Richard H.; Elrod,Scott A.; Peeters,Eric; Torres,Francisco E., Apparatus and method for a nanocalorimeter for detecting chemical reactions.
  2. Michel Vilain FR; Jean-Jacques Yon FR, Bolometric detector with intermediate electrical insulation and manufacturing process for this detector.
  3. Soda, Haruhisa, Directional coupler type optical modulator with traveling-wave electrode.
  4. Sone, Yuji; Ueda, Naoyuki; Nakamura, Yuki; Abe, Yukiko, Field-effect transistor, semiconductor memory display element, image display device, and system.
  5. Hashimoto, Kazuhiko; Mukaigawa, Tomonori; Kubo, Ryuichi; Kishihara, Hiroyuki; Noda, Minoru; Okuyama, Masanori, Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same.
  6. Iida Yoshinori,JPX, Infrared solid-state image sensor and manufacturing method thereof.
  7. Bäcker, Michael; Bock, Joachim; Freyhardt, Herbert; Leenders, Andreas; Ullrich, Martin; Walter, Heribert, Method for coating a semiconductor material using high remanent induction, coated superconductor material and the use thereof.
  8. Yang, Chi-Hua; Sargent, David, Method for fabricating infrared sensors.
  9. Soda, Haruhisa; Nakagawa, Shigeru, Optical switch and optical communication system.
  10. Jack,Michael D.; Gordon,Eli E., Passive millimeter wave sensor using high temperature superconducting leads.
  11. Wolkin,Michal V.; De Bruyker,Dirk; Peeters,Eric; Bell,Alan, Resistive thermal sensing.
  12. Luukanen,Arttu, Superconducting antenna-coupled hot-spot microbolometer, methods for its manufacture and use, and a bolometric imaging arrangement.
  13. Sobolewski, Roman; Gol'tsman, Grigory N.; Semenov, Alexey D.; Okunev, Oleg V.; Wilsher, Kenneth R.; Kasapi, Steven A., Superconducting single photon detector.
  14. Sobolewski,Roman; Gol'tsman,Grigory N.; Semenov,Alexey D.; Okunev,Oleg V.; Wilsher,Kenneth R.; Kasapi,Steven A., Superconducting single photon detector.
  15. Wiesmann, Harold; Solovyov, Vyacheslav, Synthesis of YBa2CU3O7 using sub-atmospheric processing.
  16. Bruce,Richard H.; De Bruyker,Dirk; Torres,Francisco E.; Wolkin,Michal V., Thermal sensing.
  17. Bell, Alan; Bruce, Richard H.; Peeters, Eric, Thermal sensing device.
  18. Bell, Alan; Bruce, Richard H.; Peeters, Eric; Wolkin, Michal V.; De Bruyker, Dirk, Thermal sensing with bridge circuitry.
  19. Syllaios, Athanasios J.; Taylor, Michael F.; Ajmera, Sameer K., Transitioned film growth for conductive semiconductor materials.
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