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Acoustic sensor as proximity detector 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-005/28
  • G01B-017/00
출원번호 US-0775617 (1997-01-02)
발명자 / 주소
  • Samsavar Amin
  • McWaid Thomas
  • Yudin Sergey
출원인 / 주소
  • Kla-Tencor Corporation
대리인 / 주소
    Majestic, Parsons, Siebert & Hsue
인용정보 피인용 횟수 : 142  인용 특허 : 4

초록 ▼

An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick re

대표청구항 ▼

[ What is claimed is:] [1.] An instrument for sensing a sample, comprising:a first sensor, the first sensor being a profiling device for sensing the sample;a separate acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor sig

이 특허에 인용된 특허 (4)

  1. Kren George J. (Los Altos CA) Koenig Franklin R. (Palo Alto CA), Acoustic method and apparatus for measuring micron and submicron distances.
    상세보기
  2. Lo Jiann-Chang (Boca Raton FL) O\Leary Timothy J. (Boca Raton FL), Automatic surface profiling for submicron device.
    상세보기
  3. Park Sang-il (Palo Alto CA) Smith Ian R. (Los Gatos CA) Kirk Michael D. (San Jose CA), Large stage system for scanning probe microscopes and other instruments.
    상세보기
  4. Quate, Calvin F.; Khuri-Yakub, Butrus T.; Akamine, Shinya; Hadimioglu, Babur B., Near field acoustic ultrasonic microscope system and method.
    상세보기

이 특허를 인용한 특허 (142)

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