초록 ▼

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

대표청구항 ▼

[ What is claimed is:] [1.] A process to recover at least one perfluorocompound gas from a gas mixture, comprising the steps ofa) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, said gas mixture being at a first pressure and a first temperature;b)

[ What is claimed is:] [1.] A process to recover at least one perfluorocompound gas from a gas mixture, comprising the steps ofa) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, said gas mixture being at a first pressure and a first temperature;b) providing a first membrane having a feed side and a permeate side and exhibiting preferential permeation of the carrier gas, having selectivity SEL, defined as D.sub.c S.sub.c /D.sub.p S.sub.p greater than 1.0,wherein,D.sub.p is the mobility selectivity of a perfluoro compound gasS.sub.p is the solubility selectivity of the perfluoro compound gasD.sub.c is the mobility selectivity of a carrier gasS.sub.c is the solubility selectivity of the carrier gas;c) contacting the feed side of said membrane with said gas mixture;d) withdrawing from the feed side of said membrane as a first non-permeate stream at a pressure which is substantially equal to said first pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas, ande) withdrawing from the permeate side of said membrane as a first permeate stream a depleted gas mixture consisting essentially of the at least one carrier gas.