초록 ▼

Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount

Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation.

대표청구항 ▼

[ What is claimed is:] [1.] A valved coupler for ultra high purity gas distribution, comprisinga valve housing having an external surface, an internal surface defining a gas-carrying chamber, and first and second aperture-defining surfaces extending from said internal surface to said external surfac

[ What is claimed is:] [1.] A valved coupler for ultra high purity gas distribution, comprisinga valve housing having an external surface, an internal surface defining a gas-carrying chamber, and first and second aperture-defining surfaces extending from said internal surface to said external surface and defining first and second apertures permitting gas flow between said gas-carrylng chamber and an environment external to said housing,a substantially planar flexible diaphragm having an outer periphery sealingly engaged to said internal surface of said housing, dividing said internal surface of said housing into two sections, said first and second apertures connecting to a common section of said internal surface of said housing,a sealing surface movable with said diaphragm between a first position and a second position, wherein at said first position, said sealing surface engages said first aperture-defining surface of said housing to seal said first aperture at a location substantially coplanar with said external surface of said housing in a region bordering said first aperture-defining surface, and at said second position said sealing surface does not seal said first aperture, whereby when said first aperture is sealed by said sealing surface only said first aperture-defining surface of said housing and an inner area of said sealing surface are exposed to an external environment.