초록 ▼

Multi-level structures including a first layer with a parylene polymer layer deposited thereon. The parylene polymer layer has the structure: [ STR 1 ] m is an integer having a value of 0, 1, 2, 3 or 4, and z is greater than 1. G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group o

Multi-level structures including a first layer with a parylene polymer layer deposited thereon. The parylene polymer layer has the structure: [ STR 1 ] m is an integer having a value of 0, 1, 2, 3 or 4, and z is greater than 1. G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C.sub.n H.sub.y X.sub.w. X is a halogen, and n is an integer greater than zero. The sum of y and w is at most equal to a 2n+1. The parylene polymer layer can have a zinc impurity level of about 66 parts per billion or less. The parylene polymer layers are formed by a process in which monomers are formed outside of a deposition zone of a vacuum chamber. The monomers may be prepared by a process in which a parylene dimer is vaporized and subsequently pyrolized. The process may further include the step of passing the vapor through a post-pyrolysis zone prior to depositing the monomer on the substrate.

대표청구항 ▼

[ We claim:] [1.] A multi-level structure, comprising:a first layer having a surface; anda parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: [ STR 11 ] wherein m is an integer having a value of 0, 1, 2, 3

[ We claim:] [1.] A multi-level structure, comprising:a first layer having a surface; anda parylene polymer layer disposed along the surface of the first layer, the parylene polymer layer being formed from a material having a structure: [ STR 11 ] wherein m is an integer having a value of 0, 1, 2, 3 or 4, z is greater than 1, G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C.sub.n H.sub.y X.sub.w, wherein X is a halogen, n is an integer greater than zero and a sum of y and w is at most equal to a sum of 2n and 1, and wherein the parylene polymer layer has a zinc impurity level of at most 66 parts per billion.