초록 ▼

A monolithically integrated switched capacitor bank using MEMS technology that is capable of handling GHz signal frequencies in both the RF and millimeter bands while maintaining precise digital selection of capacitor levels over a wide tuning range. Each MEMS switch includes a cantilever arm that i

A monolithically integrated switched capacitor bank using MEMS technology that is capable of handling GHz signal frequencies in both the RF and millimeter bands while maintaining precise digital selection of capacitor levels over a wide tuning range. Each MEMS switch includes a cantilever arm that is affixed to the substrate and extends over a ground line and a gapped signal line. An electrical contact is formed on the bottom of the cantilever arm positioned above and facing the gap in the signal line. A top electrode atop the cantilever arm forms a control capacitor structure above the ground line. A capacitor structure, preferably a MEMS capacitor suspended above the substrate at approximately the same height as the cantilever arm, is anchored to the substrate and connected in series with a MEMS switch. The MEMS switch is actuated by applying a voltage to the top electrode, which produces an electrostatic force that attracts the control capacitor structure toward the ground line, thereby causing the electrical contact to close the gap in the signal line and connect the MEMS capacitor structure between a pair of output terminals. The integrated MEMS switch-capacitor pairs have a large range between their on-state and off-state impedance, and thus exhibit superior isolation and insertion loss characteristics.

대표청구항 ▼

[ We claim:] [1.] A monolithically integrated switched capacitor bank, comprising:a substrate;a pair of output signal lines on said substrate that terminate at respective output terminals;a plurality of micro electro mechanical system (MEMS) switches on said substrate; anda plurality of capacitors o

[ We claim:] [1.] A monolithically integrated switched capacitor bank, comprising:a substrate;a pair of output signal lines on said substrate that terminate at respective output terminals;a plurality of micro electro mechanical system (MEMS) switches on said substrate; anda plurality of capacitors on said substrate, each of said switches integrated with a respective one of said plurality of capacitors on said substrate to form a series-connected switch-capacitor pair, said switch-capacitor pairs connected in parallel between the pair of output signal lines, each of said MEMS switches switching in response to a respective control signal to connect and disconnect its respective capacitor to set a total capacitance seen at said output terminals to one of a plurality of levels.