초록 ▼

A dry cleaner easily and rapidly eliminates particles and dirt adhered to interior surfaces of the wafer carrier. The dry cleaner has a housing with a table mounted thereon, and an assembly for cleaning the wafer carriers disposed on the table. The cleaning assembly sprays a cleaning gas simultaneou

A dry cleaner easily and rapidly eliminates particles and dirt adhered to interior surfaces of the wafer carrier. The dry cleaner has a housing with a table mounted thereon, and an assembly for cleaning the wafer carriers disposed on the table. The cleaning assembly sprays a cleaning gas simultaneously into the carrier box and the cover of the wafer carrier. Dirt and particles separated from the carrier box and the cover are collected, by vacuum pressure through openings in the table, into a dirt-collector disposed in the housing, and then discharged through an exhaust tube. A controller controls a quantity of cleaning gas supplied and a time of cleaning by the cleaning assembly.

대표청구항 ▼

[ What is claimed is:] [1.] A dry cleaner for wafer carriers, each of said wafer carriers having a carrier box and a cover, said dry cleaner comprising:a housing;a table mounted on a top of said housing;means for purifying a gas supplied from an outside source into a gas introducing pipe entering sa

[ What is claimed is:] [1.] A dry cleaner for wafer carriers, each of said wafer carriers having a carrier box and a cover, said dry cleaner comprising:a housing;a table mounted on a top of said housing;means for purifying a gas supplied from an outside source into a gas introducing pipe entering said housing;means for cleaning said wafer carriers, said cleaning means being disposed on said table, said gas being introduced from said gas introducing pipe to said cleaning means and then sprayed into said carrier box and said cover, said cleaning means supporting said carrier box and said cover in a state that said carrier box and said cover are opened while said cleaning means cleans said carrier box and said cover by simultaneously spraying the gas into said carrier box and said cover;a dirt-collector disposed under said table and in said housing for collecting, by a vacuum pressure applied from under the table, dirt or particles separated from said carrier box and said cover, said dirt-collector then discharging said dirt through an exhaust tube; andmeans for controlling quantity of said gas supplied into said gas introducing pipe and time of cleaning by said cleaning means.