초록 ▼

Methods and devices for producing plasmas of more uniform density and greater height than plasmas generated by previously known magnetron-type plasma-generating devices. The present invention utilizes electrodes containing multiple magnets positioned such that like magnetic poles of the magnets are

Methods and devices for producing plasmas of more uniform density and greater height than plasmas generated by previously known magnetron-type plasma-generating devices. The present invention utilizes electrodes containing multiple magnets positioned such that like magnetic poles of the magnets are all facing in substantially the same direction.

대표청구항 ▼

[ What is claimed is:] [1.] A plasma-generating device, comprising two electrodes, at least one of said electrodes defining an electrode surface and containing two or more magnets, each magnet in the magnet-containing electrode having two opposite magnetic poles, all magnets in the magnet-containing

[ What is claimed is:] [1.] A plasma-generating device, comprising two electrodes, at least one of said electrodes defining an electrode surface and containing two or more magnets, each magnet in the magnet-containing electrode having two opposite magnetic poles, all magnets in the magnet-containing electrode positioned such that like magnetic poles of said magnets are all facing in substantially the same direction, each magnetic pole of each magnet producing a magnetic field with the opposite magnetic pole on the same magnet; each magnetic field having a component parallel to said electrode surface.