[특허]Capacitive pressure transducer with improved electrode support

[미국특허] Capacitive pressure transducer with improved electrode support 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01L-009/12
출원번호	US-0880035 (1997-06-20)
발명자 / 주소	Denner John A.
출원인 / 주소	MKS Instruments, Inc.
대리인 / 주소	Hale and Dorr LLP
인용정보	피인용 횟수 : 59 인용 특허 : 15

초록 ▼

The disclosed pressure transducer assembly includes metallic body, a diaphragm, a metallic plate, an insulator, and a conductor. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm flexes in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm flexes in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The metallic plate is fixed to the metallic body in one of the first and second chambers. The insulator is also disposed in that chamber and is fixed to the metallic plate. The conductor is disposed on the insulator. The diaphragm and the conductor are characterized by a capacitance. The capacitance is representative of a difference between the pressures in the first and second chambers.

대표청구항 ▼

[ What is claimed is:] [1.] A pressure transducer assembly comprising:(A) a body defining an interior cavity;(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;(C) a plate, said plate being fixed to said body in said first chamber;(D) an insulator disposed in said first chamber, said insulator being fixed to said plate, a first portion of said plate overlying a first portion of said insulator, said first portion of said plate being spaced apart from said first portion of said insulator;(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

이 특허에 인용된 특허 (15) 인용/피인용 타임라인 분석

Benson Richard A. (Bedford MA) Denner John A. (Lynn MA), Absolute capacitance manometers.
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Ferran Robert J. (La Jolla CA) Osterstrom Gordon E. (Spring Valley CA), Capacitance manometer having stress relief for fixed electrode.
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Lee ; Shih-Ying ; Briefer ; Dennis K., Capacitive pressure sensing device.
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Delatorre Leroy C. (9220 Clairwood #2024 Houston TX 77036), Capacitive pressure sensor.
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Kremidas James R. (Fenton MI), Capacitive pressure sensor.
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Lee Shih-Ying (Lincoln MA) Briefer Dennis K. (Berlin MA), Capacitive pressure sensor.
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Lee Shih-Ying (Lincoln MA) Li Sen Z. (Acton MA), Capacitive pressure sensor.
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Lee Shih-Ying (Lincoln MA), Capacitive pressure sensor having a pedestal supported electrode.
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Lee Shih Y. (Huckleberry Hill Lincoln MA 01773), Capacitor transducer.
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Briefer Dennis K. (Berlin MA), Diaphragm.
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Doyle ; Jr. Nicholas E. (Norwood MA), Diaphragm assembly.
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Miller Mark (13360 Wheelock Rd. Corry PA 16407) Miller Thomas W. (7 Airport Rd. Corry PA 16407), Downhole pressure gauge converter.
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Jeffrey Michael J. (Newtown PA) Osenbach Frank A. (Cinnaminson NJ), Flange mounted pressure transmitter.
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Park Kyong (Thousand Oaks CA), Low pressure transducer using metal foil diaphragm.
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Nishihara Toshihiko (Yokohama JPX), Variable-capacitance type sensor and variable-capacitance type sensor system using the same.
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이 특허를 인용한 특허 (59) 인용/피인용 타임라인 분석

Ferran, Robert J.; Rohrbach, Daniel M.; Oswald, Michael, Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis.
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Lucas, Paul D.; Denner, John; Grudzien, Chris P.; Lischer, Jeff; Weight, Kristen, Capacitive based pressure sensor design.
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Hegner, Frank, Capacitive ceramic relative-pressure sensor.
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Lischer D. Jeffrey ; Blankenship Steven D., Capacitive pressure transducer with improved electrode support.
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Lischer,D. Jeffrey; Traverso,Robert, Contaminant deposition control baffle for a capacitive pressure transducer.
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Schulte, John P.; Tyson, David G.; Klosinski, Andrew J., Differential pressure sensor with line pressure measurement.
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Broden, David A.; Hedtke, Robert C.; Klosinski, Andrew J.; Sittler, Fred C., Differential pressure transmitter with complimentary dual absolute pressure sensors.
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Hedtke, Robert C., Differential pressure transmitter with pressure sensor.
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Orth, Kelly M., Field device with dynamically adjustable power consumption radio frequency communication.
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Vanderaa, Joel D.; Grunig, Christina A.; Hurd, Ronald F.; Westfield, Brian L.; McGuire, Chad M.; Paullus, Steven B., Form factor and electromagnetic interference protection for process device wireless adapters.
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O'Brien, David; Courcimault, Christophe; You, Liang; Joung, Yeun-Ho; Allen, Mark, Hermetic chamber with electrical feedthroughs.
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Agami,Mark, High-temperature reduced size manometer.
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Harasyn,Donald E.; Willcox,Charles R., Line pressure measurement using differential pressure sensor.
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Grudzien, Chris P., Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor.
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Willcox, Charles R., Method and apparatus for pressure measurement using magnetic property.
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Hedtke, Robert C.; Lu, Liangju, Method and apparatus for pressure measurement using quartz crystal.
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Jonsson,Steffan, Method for producing a pressure sensor for detecting small pressure differences and low pressures.
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Silverbrook, Kia; Mallinson, Samuel George, Method of fabricating a integrated pressure sensor.
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Grudzien,Chris P., Method of forming a seal between a housing and a diaphragm of a capacitance sensor.
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Grudzien,Chris P., Method of forming a seal between a housing and a diaphragm of a capacitance sensor.
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Kaelberer, Arnd; Reinmuth, Jochen; Classen, Johannes, Micromechanical pressure sensor device and corresponding manufacturing method.
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Silverbrook, Kia; Mallinson, Samuel George, Miniature pressure sensor assembly.
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Quigley, Claudia J.; Lahey, Kerry S.; Mathew, Santhi E.; Maxwell, Jr., J. Robert; Mindlin, Leonid; Poulin, James M.; St. Paul, Gardy, Multi-temperature heater for use with pressure transducers.
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Brown, Gregory C.; Klosinski, Andrew J.; Trimble, Steven R.; Fandrey, Mark, Power generation for process devices.
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Arunachalam, Jawahar; Kasturi, Udayashankar Bangalore, Power supply for industrial process field device.
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Blankenship, Steven D.; Lucas, Paul D., Pressure sensor.
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Willcox, Charles R., Pressure sensor.
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Harasyn,Donald E.; Willcox,Charles R.; Klosinski,Andrew J., Pressure sensor fault detection.
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Jonsson,Steffan, Pressure sensor for detecting small pressure differences and low pressures.
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Schumacher,Mark; Klosinski,Andrew, Pressure sensor with deflectable diaphragm.
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Silverbrook, Kia; Mallinson, Samuel George, Pressure sensor with temperature compensation.
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Poulin, James M.; Mathew, Santhi E.; Mindlin, Leonid; Quigley, Claudia J.; Blankenship, Stephen D., Pressure transducer assembly with thermal shield.
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Nassar, Marcos A.; Cordan, Ernest W.; Urban, Mark L., Pressure transducer with capacitively coupled source electrode.
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Sund,Wesley E.; Nord,Christina A.; Sittler,Fred C.; McIntire,John, Pressure transducer with external heater.
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Broden, David A.; Joseph, A. Stanley, Pressure transmitter for clean environments.
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Hedtke,Robert C., Pressure transmitter with acoustic pressure sensor.
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Klosinski,Andrew J.; Schulte,John P., Process control transmitter with vibration sensor.
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Westfield, Brian L.; Orth, Kelly M., Process field device temperature control.
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Karschnia,Robert J.; Willcox,Charles R.; Broden,David A.; Westfield,Brian L.; Orth,Kelly M., Process field device with radio frequency communication.
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Frick Roger L. ; Rud Jr. Stanley E. ; Broden David A., Process pressure measurement devices with improved error compensation.
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Frick, Roger L., Process sensor module having a single ungrounded input/output conductor.
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Hedtke, Robert C., Process transmitter with wireless communication link.
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Sittler, Fred C.; Hedtke, Robert C., Process variable transmitter with acceleration sensor.
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Kielb, John A.; Karschnia, Robert J.; Westfield, Brian L.; Orth, Kelly M.; Broden, David A., RF adapter for field device.
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Kielb, John A.; Westfield, Brian L., RF adapter for field device with loop current bypass.
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Kielb, John A.; Westfield, Brian L.; Orth, Kelly M., RF adapter for field device with low voltage intrinsic safety clamping.
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Kielb, John A., RF adapter for field device with variable voltage drop.
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Klosinski, Andrew J.; Willcox, Charles R., Resonant frequency based pressure sensor.
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Wang, Rongtai, Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter.
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Traverso,Robert, Surface area deposition trap.
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Silverbrook, Kia; Mallinson, Samuel George, Temperature compensating pressure sensing arrangement.
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Silverbrook,Kia; Mallinson,Samuel George, Temperature compensating pressure sensor having active and reference membranes.
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Miller,Craig E.; Poulin,James M., Thermal mounting plate for heated pressure transducer.
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Grudzien,Chris P., Turbo sump for use with capacitive pressure sensor.
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Vanderaa, Joel David, Wire harness for field devices used in a hazardous locations.
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Vanderaa, Joel D.; Grunig, Christina A.; Hurd, Ronald F., Wireless communication adapter for field devices.
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Korolev, Eugene, Wireless interface within transmitter.
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Strei, David Matthew; Vanderaa, Joel David, Wireless process communication adapter with improved encapsulation.
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Nelson, Richard L.; Ostby, Philip G.; Brown, Gregory C., Wireless process field device diagnostics.
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[미국특허] Capacitive pressure transducer with improved electrode support 원문보기

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[미국특허] Capacitive pressure transducer with improved electrode support 원문보기

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