[특허]Hartmann-type optical wavefront sensor

[미국특허] Hartmann-type optical wavefront sensor 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01J-001/00 G01J-001/20
출원번호	US-0984751 (1997-12-04)
발명자 / 주소	DeLong Raymond K. Hutchin Richard A.
출원인 / 주소	TRW Inc.
대리인 / 주소	Yatsko
인용정보	피인용 횟수 : 37 인용 특허 : 2

초록 ▼

An optical wavefront sensor for measuring phase tilt in two dimensions across the cross section of a beam (14), using only a single lenslet array (26) and a single camera sensor array (28). The rectangular lenslet array (26) is oriented at 45 degrees to first and second orthogonal sets of axes defining multiple points of interest (22') in the beam cross section, such that each lenslet subaperture is centered (at 40) between adjacent points of interest on the first and second axes. The points of interest (22') are locations corresponding to the positions of actuators (22) in an adaptive optics system. The camera sensor array (28) has more cells per unit area than there are subapertures per unit area. Only selected cells are activated, to provide for measurements at the approximate mid-points of lines between adjacent points of interest (22') on the first and second orthogonal axes. Thus the sensor array (28) has enough active cells to effect measurements in both orthogonal directions without interference between the cells used for measurement in the two directions, and without the need for multiple lenslet arrays or sensor arrays.

대표청구항 ▼

[ What is claimed is:] [1.] A wavefront sensor for use in measuring local phase tilt in two dimensions over an optical beam cross section, along first and second orthogonal sets of grid lines intersecting at points of interest corresponding to positions of optical device actuators, the wavefront sensor comprising:a lenslet array having a plurality of lenslets with optical axes positioned on points of intersection of a rectangular grid, which is oriented at an angle to the first and second orthogonal sets of grid lines, wherein the lenslets are spaced in such a manner that the lenslet optical axes are positioned on the first and second orthogonal sets of grid lines, between adjacent points of interest at the intersections of those lines; anda camera sensor array having a plurality of sensor cells disposed in a rows and columns oriented parallel with the first and second orthogonal sets of grid lines and positioned adjacent to the lenslet array to receive light passing through it, wherein only selected cells of the sensor array, corresponding approximately with the positions of the lenslet optical axes, are activated to provide a measure of phase tilt in the directions of the orthogonal sets of grid lines;whereby only one lenslet array and one camera sensor array are required to provide tilt measurements in both orthogonal directions.

이 특허에 인용된 특허 (2) 인용/피인용 타임라인 분석

Feinleib Julius M. (Cambridge MA), Sensor system for detecting wavefront distortion in a return beam of light.
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Zmek William (Naugatuck CT), Wavefront sensor having a lenslet array as a null corrector.
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이 특허를 인용한 특허 (37) 인용/피인용 타임라인 분석

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Praus, II, Robert W.; Eastman, Daniel, Adaptive dynamic range wavefront sensor.
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Ai, Chia-Yu, Apparatus and method for measuring a wavefront using a screen with apertures adjacent to a multi-lens array.
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Cheung, Ken C. K.; Hugo, Ronald J., Array of lateral effect detectors for high-speed wavefront sensing and other applications.
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Haugen, Paul R.; Fishbaine, David; Rudd, Eric P.; Kranz, David M.; Haugen, Carl E.; Reinhardt, Adam, Automated system with improved height sensing.
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King, William B.; Chen, Chungte W.; Byren, Robert W.; McKearn, Chaunchy F., Beam director and control system for a high energy laser within a conformal window.
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Della Vecchia,Michael A.; Donoso,Larry; Vorontsov,Mikhail A., Clarifying an image of an object to perform a procedure on the object.
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Smith,Mark Anderson, Closed loop compensation system and method for a deformable mirror.
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Phillips,Alton; Sogard,Michael, Deformable mirror actuation system.
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Watson, Douglas C., Deformable mirror with passive and active actuators.
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Wirth, Allan, Dispersed Hartmann sensor and method for mirror segment alignment and phasing.
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Ishikawa, Jun, Exposure apparatus, exposure method, and device manufacturing method.
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Campbell, Charles E., Eye refractor with active mirror wavefront sensor.
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DellaVecchia, Michael A.; Donoso, Larry; Vorontsov, Mikhail A.; Cathcart, Gary; Beresnev, Leonid I.; Banta, Matt, High-resolution retina imaging and eye aberration diagnostics using stochastic parallel perturbation gradient descent optimization adaptive optics.
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DellaVecchia, Michael A.; Donoso, Larry; Vorontsov, Mikhail A.; Cathcart, Gary; Beresnev, Leonid I.; Banta, Matt, High-resolution retina imaging and eye aberration diagnostics using stochastic parallel perturbation gradient descent optimization adaptive optics.
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Andersen,Geoff P.; Reibel,Randy, Holographic wavefront sensor.
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Roy E. Williams ; James F. Freeman ; Jerre M. Freeman, Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (DMD) mirror patterns.
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Oberdoerster, Thomas, Method and apparatus for measuring the shape of a wave-front of an optical radiation field.
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Wirth, Allan, Method and apparatus for wavefront measurement that resolves the 2-π ambiguity in such measurement and adaptive optics systems utilizing same.
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DellaVecchia, Michael A.; Donoso, Larry, Method for optically scanning objects.
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Donoso, Larry; DellaVecchia, Michael, Method for selecting images.
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Stephen A. Burns ; Robert H. Webb, Methods and apparatus for measurement and correction of optical aberration.
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Millerd James E. ; Brock Neal J., Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry.
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Ai, Chia-Yu; Asami, Takeshi, Multi-lens array of a wavefront sensor for reducing optical interference and method thereof.
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Wirth,Allan, Optical instrument employing a wavefront sensor capable of coarse and fine phase measurement capabilities during first and second modes of operation.
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Gross, Erik; Campbell, Charles, Optical surface shape determination by mapping a lenslet array spot pattern to a spatial frequency space.
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Gross, Erik; Campbell, Charles, Optical surface shape determination by mapping a lenslet array spot pattern to spatial frequency space.
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Li, Xiang; Zhao, Liping; Fang, Zhong Ping; Anand, Krishna Asundi; Ong, Lin Seng; Rinov, Herawan, Optical wavefront sensor and optical wavefront sensing method.
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Della Vecchia,Michael A.; Donoso,Larry; Vorontsov,Mikhail A., Optimizing the properties of electromagnetic energy in a medium using stochastic parallel perturbation gradient descent optimization adaptive optics.
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Mertz, Jerome Charles; Chu, Kengyeh Ken; Parthasarathy, Ashwin, Partitioned aperture wavefront imaging method and system.
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Yang, Juping; Fujii, Toru; Inoue, Fuyuhiko, Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method.
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Inoue, Fuyuhiko, Position detecting method optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method.
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Sweatt,William C.; Vawter,G. Allen, Relaying an optical wavefront.
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Gross, Erik; Campbell, Charles, Spatial frequency wavefront sensor system and method.
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Daniel R. Neal ; Justin D. Mansell, Sub-lens spatial resolution Shack-Hartmann wavefront sensing.
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Mizuno, Yasushi, Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device.
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Wirth,Allan; Jankevics,Andrew, Wavefront sensing system employing active updating of reference positions and subaperture locations on wavefront sensor.
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[미국특허] Hartmann-type optical wavefront sensor 원문보기