초록 ▼

A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethylcyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (16

A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethylcyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (162) on the burner mounting block (107), and a recess (160) in the back of the subassembly (13). The burner's face includes four concentric gas-emitting regions: a first central region (36, 90) from which exits a mixture of OMCTS and O.sub.2, a second innershield region (38, 92) from which exits N.sub.2, a third outershield region (40, 42, 94, 96) from which exits O.sub.2, and a fourth premix region (44, 98) from which exits a mixture of CH.sub.4 and O.sub.2. The burner provides more efficient utilization of halide-free, silicon-containing raw materials than prior burners.

대표청구항 ▼

[ What is claimed is:] [1.] A silicon dioxide containing soot-producing burner comprising:(a) a burner subassembly which comprises:a back block having a plurality of gas-carrying passages,a face block having a central gas-carrying passage and a plurality of gas-carrying passages surrounding the cent

[ What is claimed is:] [1.] A silicon dioxide containing soot-producing burner comprising:(a) a burner subassembly which comprises:a back block having a plurality of gas-carrying passages,a face block having a central gas-carrying passage and a plurality of gas-carrying passages surrounding the central gas-carrying passage,a manifold plate between the back block and the face block, said manifold plate comprising a plurality of orifices for providing equalization of a pressure of gas flowing through the plurality of gas-carrying passages surrounding the central gas-carrying passage of the face block, and;(b) a burner mounting block which comprises a first burner mounting block bolt and a first burner mounting block bolt hole for attachment of said burner mounting block to a gas-supplying manifold; wherein said burner subassembly is mounted on the burner mounting block.