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Method and apparatus for the preparation of clean gases 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/04
출원번호 US-0044235 (1998-03-19)
발명자 / 주소
  • Fujii Toshiaki,JPX
  • Suzuki Tsukuru,JPX
  • Suzuki Hidetomo,JPX
  • Sakamoto Kazuhiko,JPX
출원인 / 주소
  • Ebara Research Co., Ltd., JPX
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 25  인용 특허 : 18

초록 ▼

A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in a high-tech industry such as in the production of semicondu

대표청구항 ▼

[ We claim:] [1.] A method for cleaning a gas containing hydrocarbons, said method comprising the following sequential steps of:passing a gas containing hydrocarbons through a dehumidifier to reduce a relative humidity thereof to not more than 30%;passing the gas through an adsorber and/or absorber

이 특허에 인용된 특허 (18)

  1. Bingham Larry A. (Mission Viejo CA), Adsorption process.
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  2. Rhodes James A. (42 East Gay St. ; Suite 1300 Columbus OH 43215), Air control system providing healthful enclosed environment.
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  3. Holter, Heinz; Igelbuscher, Heinrich; Gresch, Heinrich; Dewert, Heribert, Apparatus for cleaning air loaded with pollutants.
    상세보기
  4. Schoenberger Stephen B. (Northbrook IL) Reavis Robert M. (Kansasville WI), Apparatus for filtering air and for creating a positive/negative pressure.
    상세보기
  5. Stinson Margaret C. (N. Billerica MA), Apparatus for housing radioactive items during incubation.
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  6. Satoh Kazuo (Nishi-Okitama JPX) Ogawa Yohji (Nishi-Okitama JPX) Okano Hirofumi (Nishi-Okitama JPX) Suzuki Kiyomi (Higashi-Okitama JPX), Apparatus for preventing clouding of a semiconductor wafer.
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  7. Satoh Kazuo (Okitama JPX) Ogawa Yohji (Okitama JPX) Okano Hirofumi (Okitama JPX) Suzuki Kiyomi (Higashi-Okitama JPX), Apparatus for preventing clouding of a semiconductor wafer.
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  8. Cornwell James H. (Raleigh NC), Apparatus for treating indoor air.
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  9. Gmelin Robert (Cranford NJ) LaCava Alberto (South Plainfield NJ), Economical air separator.
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  10. Ho Chi Pai (Cary NC) Petty Robert H. (Sanford NC), Filter apparatus.
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  11. Williams Clifford C. B. (Tamworth GBX), Gas filter.
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  12. Stolz Albert (Tubingen NY DT) Stehle Axel (Nanuet NY), Installation for venting the interior space of a motor vehicle.
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  13. Obee Timothy N. (South Windsor CT) Melikian Gorken (Somers CT), Integrated air conditioning system.
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  14. Spiegel Ronald J. (Chapel Hill NC) Sederquist Richard A. (Newington CT) Trocciola John C. (Glastonbury CT) Healy Herbert C. (Hebron CT) Lesieur Roger R. (Enfield CT) Sandelli Gregory J. (Newington CT, Landfill gas treatment system.
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  15. Suzuki Masanori (Tokyo JPX), Method and apparatus for eliminating electric charges in a clean room.
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  16. Cantoni Maria C. (Rome ITX), Multiple filter unit.
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  17. Andrews David K. (Cheltenham GB2) Benson Trevor P. (Evesham GB2) Smart Michael W. (Churchdown GB2), Pure-air generator.
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  18. Matthews William G. (Hartsdale NY) Shaw Herbert C. (Mobile AL), Selective adsorption of NOx from gas streams.
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이 특허를 인용한 특허 (25)

  1. Shimomura Masako,JPX ; Masuda Kazuaki,JPX ; Sato Osamu,JPX ; Noguchi Hiromichi,JPX, Adsorbent for ink jet use, an ink retaining container, an adsorption member using such adsorbent, an ink supply system having such adsorption member, and an ink jet recording apparatus.
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  2. Shimomura, Masako; Masuda, Kazuaki; Sato, Osamu; Noguchi, Hiromichi, Adsorbent for ink jet use, an ink retaining container, an adsorption member using such adsorbent, an ink supply system having such adsorption member, and an ink jet recording apparatus.
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  3. Shimomura, Masako; Masuda, Kazuaki; Sato, Osamu; Noguchi, Hiromichi, Adsorbent for ink jet use, an ink retaining container, an adsorption member using such an adsorbent, an ink supply system having such adsorption member, and an ink jet recording apparatus.
    상세보기
  4. Nami Hirata JP; Yoichi Fujumura JP; Hideo Saruyama JP; Masaki Amano JP, Chemical filter unit and gas purification system.
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  5. Toshiaki Fujii JP; Motoaki Adachi JP; Kikuo Okuyama JP, Chemical vapor deposition method and chemical vapor deposition apparatus.
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  6. Renz Manfred,DEX, Clean room.
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  7. Poll, Wayne Lyle; Huddleston, Matthrew J.; Post, William J.; Ward, Thomas J.; Crisafulli, Caroline M.; Landis, Adam, Device for maintaining visualization with surgical scopes.
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  8. Poll, Wayne L.; Drach, Gregory, Devices, systems, and methods for performing endoscopic surgical procedures.
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  9. McGee, Phillip; Kochie, Robert; Ribeiro, Durval S., Filter for a gas analyzer.
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  10. Schultz, René, Filter for a resin vessel.
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  11. Lim, Chang-Su; Im, Suk-Hee; Hwang, Jung-Sung, Fresh air ducts including downstream filters for clean rooms.
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  12. Lohr, David; Wager, Raquel, Incubator having combined HEPA and VOC filter.
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  13. Fujii, Toshiaki; Suzuki, Tsukuru; Suzuki, Hidetomo; Sakamoto, Kazuhiko, Method and apparatus for the preparation of clean gases.
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  14. Fujii,Toshiaki; Suzuki,Tsukuru; Suzuki,Hidetomo; Sakamoto,Kazuhiko, Method and apparatus for the preparation of clean gases.
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  15. Toshiaki Fujii JP; Tsukuru Suzuki JP; Hidetomo Suzuki JP; Kazuhiko Sakamoto JP, Method and apparatus for the preparation of clean gases.
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  16. Derong Zhou ; John P. Borzio ; Earle Kebbekus ; David Miner, Nitrous oxide purification system and process.
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  17. Zhou, Derong; Borzio, John P.; Kebbekus, Earle; Miner, David, Nitrous oxide purification system and process.
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  18. Arthur Edward Holmer, Purification of hexafluoroethane.
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  19. Yamawaku, Jun; Oikawa, Junji; Nakayama, Hiroyuki, Substrate processing apparatus and exhaust method therefor.
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  20. Drach, Gregory P.; Poll, Wayne L., Systems and methods for optimizing and maintaining visualization of a surgical field during the use of surgical scopes.
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  21. Drach, Gregory P; Poll, Wayne L, Systems and methods for optimizing and maintaining visualization of a surgical field during the use of surgical scopes.
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  22. Poll, Wayne L.; Crisafulli, Caroline M.; Drach, Gregory P., Systems and methods for optimizing and maintaining visualization of a surgical field during the use of surgical scopes.
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  23. Poll, Wayne L.; Huddleston, Matthew J.; Crisafulli, Caroline M.; Landis, Adam; Drach, Gregory P., Systems and methods for optimizing and maintaining visualization of a surgical field during the use of surgical scopes.
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  24. Poll, Wayne L.; Huddleston, Matthew J.; Crisafulli, Caroline M.; Landis, Adam; Drach, Gregory P., Systems and methods for optimizing and maintaining visualization of a surgical field during the use of surgical scopes.
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  25. Poll, Wayne L.; Huddleston, Matthew J.; Crisafulli, Caroline M.; Landis, Adam; Drach, Gregory, View optimizer and stabilizer for use with surgical scopes.
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