초록 ▼

An intelligent backup controller performs graceful shutdown of a processing system upon the loss of main AC power. The power source supply is monitored to detect a switch from main AC power to backup power, triggering a sequence of events effecting the graceful shutdown of the processing system. The

An intelligent backup controller performs graceful shutdown of a processing system upon the loss of main AC power. The power source supply is monitored to detect a switch from main AC power to backup power, triggering a sequence of events effecting the graceful shutdown of the processing system. These events include the steps of notifying the operating system of the processing system to commence shutdown procedures, triggering a first timer beginning with detection of the switch from main AC power to backup power, triggering a second timer upon receipt of a shutdown complete indication from the operating system, and terminating provision at the expiration of either timer unless main AC power is restored during the process. The intelligent backup controller can comprise PC-ISA based printed circuit board having a programmable logic device which serves to effect the monitoring and control functions, along with a serial port emulator for interfacing with the equipment being controlled.

대표청구항 ▼

[ What is claimed is:] [1.] A device for effecting processing system shutdown of a semiconductor etching or a semiconductor deposition apparatus by implementing operating system shutdown procedures for the apparatus and turning off backup power to the apparatus, said device comprising:shutdown contr

[ What is claimed is:] [1.] A device for effecting processing system shutdown of a semiconductor etching or a semiconductor deposition apparatus by implementing operating system shutdown procedures for the apparatus and turning off backup power to the apparatus, said device comprising:shutdown control means, for initiating the operating system shutdown procedures in response to a transition in a power source supplying power to the apparatus from a main power source to a backup power source;first counter means for counting a first delay period of a first predetermined duration, said first delay period commencing with completion of the operating system shutdown procedures;power shutdown means for performing a shutdown procedure by turning off backup power upon expiration of said first delay period; andaborting means for terminating the shutdown procedure of the power shutdown means if main power is restored before the turning off of backup power by the power shutdown means.