초록 ▼

A megasonic cleaning system includes a transducer on which a substrate to be cleaned is placed. An oscillating electrically energy source is coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies to vibrate the substrate. A blower ass

A megasonic cleaning system includes a transducer on which a substrate to be cleaned is placed. An oscillating electrically energy source is coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies to vibrate the substrate. A blower assembly is arranged over the substrate, and the blower assembly contains a hollow elongate member having a plurality of nozzles spaced along a length thereof. A drive mechanism is connected to the blower assembly such that the blower assembly is horizontally movable relative to the surface of the substrate. A source of cleaning fluid is in flow communication with the nozzles, and the nozzles are arranged such that a flow path of cleaning fluid through the nozzles is inclined toward an upper surface of the substrate to be cleaned. A vacuum source is in flow communication with the substrate for vacuum-adhering the substrate on the transducer via a vacuum force. The cleaning fluid flowing through the nozzles is directed toward the upper surface of the substrate to blow away particles on the upper surface of the substrate that are dislodged by the vibration of the substrate.

대표청구항 ▼

[ What is claimed is:] [1.] A megasonic cleaning system, comprising:a transducer on which a substrate to be cleaned is placed;an oscillating electrical energy source operatively coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies t

[ What is claimed is:] [1.] A megasonic cleaning system, comprising:a transducer on which a substrate to be cleaned is placed;an oscillating electrical energy source operatively coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies to vibrate the substrate;a blower assembly arranged over the substrate, the blower assembly comprising a hollow elongate member having a plurality of nozzles spaced along a length of the elongate member;a source of cleaning fluid in flow communication with the nozzles, wherein a flow path of cleaning fluid through the nozzles is inclined toward an upper surface of the substrate to be cleaned;a vacuum source in flow communication with the substrate for vacuum-adhering the substrate on the transducer via a vacuum force; anda drive mechanism operatively connected to the blower assembly such that the blower assembly is horizontally movable relative to the upper surface of the substrate,wherein the cleaning fluid flowing through the nozzles is directed toward the upper surface of the substrate to blow away particles that are dislodged by the vibration of the substrate.