초록 ▼

An adsorption-desorption apparatus (102), and process for storage and dispensing of a gas, e.g., hydride and halide gases, and organometallic Group V compounds, which is selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent material is pr

An adsorption-desorption apparatus (102), and process for storage and dispensing of a gas, e.g., hydride and halide gases, and organometallic Group V compounds, which is selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent material is preferably a material which is devoid of concentration of trace components such as water, metals and oxidic transition metal species which would significantly decompose the sorbate gas in apparatus (102).

대표청구항 ▼

[ What is claimed is:] [1.] An adsorption-desorption apparatus, for storage and dispensing of a gas, said apparatus comprising:a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing gas into and out of said vessel;a sol

[ What is claimed is:] [1.] An adsorption-desorption apparatus, for storage and dispensing of a gas, said apparatus comprising:a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing gas into and out of said vessel;a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure;a sorbate gas physically adsorbed on said solid-phase physical sorbent medium;a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbate gas from the solid-phase physical sorbent medium, and gas flow of desorbed gas through the dispensing assembly;wherein the sorbate gas is selected from the group consisting of BCl.sub.3, B.sub.2 H.sub.6, B.sub.2 D.sub.6, HCl, HBr, HF, HI, tungsten hexafluoride, (CH.sub.3).sub.3 Sb, NF.sub.3, chlorine, germane, silane, and stibine.