초록 ▼

The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is preferred. The plasma used to effect surfac

The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is preferred. The plasma used to effect surface cleaning may be formed in atmospheric air or other gases at about one atmosphere of pressure, or at pressures below or above one atmosphere.

대표청구항 ▼

[ What is claimed is:] [35.] A method for removing contaminants from a surface of a workpiece to provide a cleaned workpiece, comprising the steps of generating a steady-state, radio-frequency (RF), uniform glow discharge plasma at a pressure of about one atmosphere between electrodes using an RF po

[ What is claimed is:] [35.] A method for removing contaminants from a surface of a workpiece to provide a cleaned workpiece, comprising the steps of generating a steady-state, radio-frequency (RF), uniform glow discharge plasma at a pressure of about one atmosphere between electrodes using an RF power source operating at a frequency of from about 100 Hz to about 30 kHz, and exposing the surface with the contaminants to the generated plasma, thereby removing the contaminants and yielding the cleaned workpiece and wherein said plasma produces ions and electrons, the RF power source operating with the electrodes to produce an electric field which traps said ions in the electric field without trapping said electrons in the electric field, thereby causing a quasi-neutral build up of positive potential of the plasma, with the electrons free to leave the plasma and collect or recombine on the surfaces of the electrodes, wherein the method is performed until the surface of the workpiece exhibits a characteristic distilled water, advancing contact angle of less than 10 degrees, as measured by a Sessile Water Drop Test, and a water drop contact diameter improvement from about 3 mm to about at least 10 mm.