[특허]Cassette transfer mechanism

[미국특허] Cassette transfer mechanism 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65G-049/07
출원번호	US-0967397 (1997-11-11)
우선권정보	JP-0317126 (1996-11-13)
발명자 / 주소	Matsushima Keiichi,JPX
출원인 / 주소	Tokyo Electron Limited, JPX
대리인 / 주소	Graham & James LLP
인용정보	피인용 횟수 : 15 인용 특허 : 12

초록 ▼

A cassette transfer mechanism according to the present invention comprises a cassette chamber for containing a cassette for holding a plurality of objects to be processed, a cassette transfer port formed in the cassette chamber, for allowing the cassette to be transferred into and from the cassette chamber, an object transfer port formed in the cassette chamber and opened at a predetermined angle to an opening direction of the cassette transfer port, for allowing the objects to be transferred into and from the cassette chamber, an elevation table provided in the cassette chamber such that the elevation table can be elevated, a shaft installed rotatably on the elevation table and extending in a direction substantially perpendicular to an opening direction of the object transfer port, a cassette support table fixed to the shaft and having a bottom support portion for receiving a bottom surface of the cassette and a back surface support portion for receiving a back surface of the cassette, for orienting the cassette supported by the bottom support portion and the back surface support portion, in the opening direction of the object transfer port, and a rotation mechanism for rotating the cassette support table between a first position inside the cassette chamber and a second position outside the cassette chamber, by rotating the shaft in in response to operation of the elevation table.

대표청구항 ▼

[ I claim:] [1.] A cassette transfer mechanism comprising:a cassette chamber for containing a cassette for holding a plurality of objects to be processed;a cassette transfer port formed in the cassette chamber, for allowing the cassette to be transferred into and from the cassette chamber;an object transfer port formed in the cassette chamber and opened at a predetermined angle to an opening direction of the cassette transfer port, for allowing the objects to be transferred into and from the cassette chamber;an elevation table provided in the cassette chamber such that the elevation table can be elevated;a shaft installed rotatably on the elevation table and extending in a direction substantially perpendicular to an opening direction of the object transfer port;a cassette support table fixed to the shaft and having a bottom support portion for receiving a bottom surface of the cassette and a back surface support portion for receiving a back surface of the cassette, for orienting the cassette supported by the bottom support portion and the back surface support portion, in the opening direction of the object transfer port; anda rotation mechanism for rotating the cassette support table between a first position inside the cassette chamber and a second position outside the cassette chamber, by rotating the shaft in response to operation of the elevation table;wherein the rotation mechanism comprises a rack provided in the cassette chamber and extending in an elevation direction of the elevation table, and a pinion gear fixed to the shaft and engaged with the rack.

이 특허에 인용된 특허 (12) 인용/피인용 타임라인 분석

Bonora Anthony C. (Menlo Park CA) Rosenquist Fred T. (Redwood City CA), Apparatus for transporting a holder between a port opening of a standardized mechanical interface system and a loading a.
상세보기
Biche Michael R. (Union City CA) Lurye Alexander (Fremont CA), Cassette input/output unit for semiconductor processing system.
상세보기
Freerks Frederik W. (Cupertino CA) Ames Kenneth D. (San Jose CA), Cassette loader having compound translational motion.
상세보기
Grunes Howard E. (Santa Cruz CA), Direct load/unload semiconductor wafer cassette apparatus and transfer system.
상세보기
Toshima Masato M. (Sunnyvale CA) Salzman Phil M. (San Jose CA) Murdoch Steven C. (Palo Alto CA) Wang Cheng (San Jose CA) Stenholm Mark A. (San Jose CA) Howard James (San Jose CA) Hall Leonard (San Jo, Dual cassette load lock.
상세보기
Asakawa Teruo (Yamanashi JPX) Ohsawa Tetsu (Kofu JPX), Handling apparatus for transferring carriers and a method of transferring carriers.
상세보기
Leonov Mark (Santa Clara CA) Kerba Emile N. (Los Altos CA) Aknin Jack (San Carlos CA), Holder mechanism for simultaneously tilting and rotating a wafer cassette.
상세보기
Caveney Robert T. ; Hofmeister Christopher A., Robot handling apparatus.
상세보기
Harada Hiroshi (Tokyo JPX) Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX), Semiconductor processing system.
상세보기
Bacchi Paul E. (Novato CA) Robalino Manuel J. (San Francisco CA), Specimen carrier holder and method of operating it.
상세보기
Asano Takanobu (Yokohama JPX) Kitayama Hirofumi (Aikawa JPX) Iwai Hiroyuki (Sagamihara JPX) Ono Yuuji (Sagamihara JPX), Vertical heat-treatment apparatus having a wafer transfer mechanism.
상세보기
Kawabata Taturo (Kawasaki JPX), Wafer transfer apparatus.
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이 특허를 인용한 특허 (15) 인용/피인용 타임라인 분석

John M. Pedersen ; Kyle M. Hanson, Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly.
상세보기
Iseki Izuru,JPX ; Sato Seiichiro,JPX ; Muraoka Yusuke,JPX, Apparatus for processing substrates.
상세보기
Davis,Jeffry A.; Nelson,Gordon Ray; Bexten,Daniel P., Automated processing system.
상세보기
Davis, Jeffry A.; Meyer, Kevin P.; Dolechek, Kert L., Automated semiconductor processing system.
상세보기
Nelson, Gordon Ray; Bexten, Daniel P.; Davis, Jeffry A., Automated semiconductor processing system.
상세보기
Nelson, Gordon Ray; Bexten, Daniel P.; Davis, Jeffry A., Automated semiconductor processing system.
상세보기
Tsuyoshi Nakamura JP; Satoshi Tochiori JP, Control apparatus.
상세보기
Pfeiffer,Michael W.; Johnson,Eric D., Disc cassette delidder and feeder system for data storage devices.
상세보기
Tsay Yuh-Dean,TWX ; Liao Shih-Chieh,TWX ; Lin Li-Ren,TWX ; Chen Wen-Yao,TWX, Interlock system for semiconductor wafer transport apparatus.
상세보기
Condrashoff, Robert Sergel; Fazio, James Patrick; Hoffman, David Eugene; Tyler, James Scott, Material handling system and methods for a multichamber plasma treatment system.
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Yeom, Seung Soo, Method and an apparatus for picking up a module IC in a customer tray of a module IC handler.
상세보기
Ishizawa Shigeru,JPX ; Matsushima Keiichi,JPX, Method of sensing access positions of arm.
상세보기
Bonora Anthony C. ; Netsch Robert ; Sullivan Patrick ; Fosnight William J. ; Shenk Joshua ; Noma Edwin, SMIF-compatible open cassette enclosure.
상세보기
Kuribayashi, Hiromitsu; Yoo, Woo Sik, Wafer processing method.
상세보기
Hiromitsu Kuribayashi JP; Woo Sik Yoo, Wafer processing system.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Cassette transfer mechanism 원문보기