초록 ▼

A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of

A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.

대표청구항 ▼

[ What is claimed is:] [1.] A filter, comprising:a first thin film structure having openings therethrough; anda second thin film structure having openings therethrough, said second thin film structure positioned relative to said first thin film structure such that said openings of said first thin fi

[ What is claimed is:] [1.] A filter, comprising:a first thin film structure having openings therethrough; anda second thin film structure having openings therethrough, said second thin film structure positioned relative to said first thin film structure such that said openings of said first thin film structure are partially blocked by said second thin film structure and said openings of said second thin film structure are partially blocked by said first thin film structure to produce pores of a substantially uniform predetermined width and length, said pores being spaces between said first thin film structure and said second thin film structure and said pores being formed as a result of removing a sacrificial layer from between said first thin film structure and said second thin film structure.