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Fabrication of small-scale cylindrical articles 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-022/027
출원번호 US-0681235 (1996-07-22)
발명자 / 주소
  • Rogers John A.
  • Jackman Rebecca J.
  • Whitesides George M.
출원인 / 주소
  • President and Fellows of Harvard College
대리인 / 주소
    Wolf, Greenfield & Sacks. P.C.
인용정보 피인용 횟수 : 151  인용 특허 : 15

초록

Techniques for fabrication of small-scale metallic structures such as microinductors, microtransformers and stents are described. A chemically active agent such as a catalyst is applied from an applicator in a pattern to an exterior surface of an article, metal is deposited according to the pattern

대표청구항

[ What is claimed is:] [1.] A method comprising:forming a pattern of a self-assembled monolayer on an exterior surface of a cylindrical article, the pattern including at least one continuous, isolated portion that encircles the cylinder; andcontacting the article with an etchant that reacts chemical

이 특허에 인용된 특허 (15)

  1. Akkapeddi Prasad R. (Norwalk CT) Hufnagel Robert E. (Ridgefield CT), Contact lithographic fabrication of patterns on large optics.
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  7. Clark Noel A. (Boulder CO) Douglas Kenneth (Boulder CO) Rothschild Kenneth J. (Newton MA), Method for parallel fabrication of nanometer scale multi-device structures.
  8. Kane James (Lawrenceville NJ), Method of fabricating lenticular arrays.
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  10. Bowers Harold C. (Rancho Palos Verdes CA), Photolithographic method for making helices for traveling wave tubes and other cylindrical objects.
  11. Nakane Hisashi (Kawasaki JPX), Photomasks for photolithographic fine patterning.
  12. Foust Donald Franklin (Scotia NY) Karas Bradley R. (Amsterdam NY) Lamby Edward J. (Scotia NY) Dumas William V. (Essex Junction VT), Process for preparing a photo-mask for imaging three-dimensional objects.
  13. Kraus Heinz (Traunreut DEX), Radiation mask for the lithographic production of patterns.
  14. Clark Noel A. (Boulder CO) Douglas Kenneth (Boulder CO) Rothschild Kenneth J. (Newton MA), Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-d.
  15. Rose James W. (Delmar NY) Karas Bradley R. (Amsterdam NY) Onyshkevych Lubomry S. (Lawrenceville NJ), Technique for preparing a photo-mask for imaging three-dimensional objects.

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