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A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second elec

A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.

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[ The invention claimed is:] [1.] A fluid property sensor comprising:a substrate including a first electrode;a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode;a signal generator which generates a predetermined electrical signa

[ The invention claimed is:] [1.] A fluid property sensor comprising:a substrate including a first electrode;a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode;a signal generator which generates a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member is dependent on a property of a fluid adjacent said flexible member; anda measuring circuit which measures the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance and that determines the property of the fluid adjacent said flexible member based on said interval of time.