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[미국특허] Sensors for use in high vibrational applications and methods for fabricating same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/20
  • H01L-029/84
출원번호 US-0968218 (1997-11-12)
발명자 / 주소
  • Kurtz Anthony D.
  • Ned Alexander A.
출원인 / 주소
  • Kulite Semiconductor Products, Inc.
대리인 / 주소
    Plevy, Esq.
인용정보 피인용 횟수 : 122  인용 특허 : 6

초록 ▼

A hermetically sealed sensor device having a glass member defining a mounting surface and base surface, the glass member including one or more pin apertures extending through the glass member from the mounting surface to the base surface. A metallic pin is disposed in each of the pin apertures, each

대표청구항 ▼

[ What is claimed is:] [1.] A semiconductor sensor device comprising:a semiconductor diaphragm member having a top surface coated with an oxide layer;P+ sensor elements fusion bonded to said oxide layer at a relatively central area of said diaphragm;P+ finger elements fusion bonded to said oxide lay

이 특허에 인용된 특허 (6) 인용/피인용 타임라인 분석

  1. Diem Bernard,FRX ; Delaye Marie-Therese,FRX, Accelerometers using silicon on insulator technology.
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  2. Pister Kristofer S. J., Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making.
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  3. Ipposhi Takashi (Hyogo JPX) Nishimura Tadashi (Hyogo JPX), Semiconductor device having piezo resistance.
    상세보기
  4. Tsuda Naoyuki (Ohtsu JPX) Yamaguchi Tsuneo (Moriyama JPX) Kaneko Tadataka (Minoo JPX), Semiconductor pressure sensor.
    상세보기
  5. Ipposhi Takashi (Hyogo JPX) Nishimura Tadashi (Hyogo JPX), Semiconductor pressure sensor and method of fabricating the same.
    상세보기
  6. Garabedian Raffi M. (San Leandro CA) Ismail M. Salleh (Newark CA) Pashby Gary J. (San Jose CA), Semiconductor sensor with a fusion bonded flexible structure.
    상세보기

이 특허를 인용한 특허 (122) 인용/피인용 타임라인 분석

  1. Payne, Alexander; Miller, Gregory, 2-D diffraction grating for substantially eliminating polarization dependent losses.
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  2. Amm, David T., Angled illumination for a single order light modulator based projection system.
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  3. Zorich, Robert S.; Borozdin, Vasiliy K.; Lieb, Yuliy N., Apparatus and methods for shielding integrated circuitry.
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  4. Trisnadi, Jahja I.; Carlisle, Clinton B., Apparatus for selectively blocking WDM channels.
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  5. Maheshwari,Dinesh, Arbitrary phase profile for better equalization in dynamic gain equalizer.
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  6. Amm, David T.; Trisnadi, Jahja; Hunter, James; Gudeman, Christopher; Maheshwari, Dinesh, Blazed grating light valve.
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  7. Lee, Steven, Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same.
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  8. Maheshwari, Dinesh; Trisnadi, Jahia; Corrigan, Robert W., Chirped optical MEM device.
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  9. Kurtz,Anthony D.; Ned,Alexander A., Combined absolute differential transducer.
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  10. Kurtz,Anthony D.; Martin,Richard J., Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method.
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  11. Kurtz, Anthony D.; Geras, Elias, Combustion transducer apparatus employing pressure restriction means.
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  12. Kurtz, Anthony D., Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header.
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  13. Leung, Omar; Amm, David T., Controlled curvature of stressed micro-structures.
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  14. Kurtz, Anthony D., Dielectrically isolated plastic pressure transducer.
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  15. Kurtz, Anthony D.; Ned, Alexander; Stefanescu, Sorin; Kurtz, Nora, Differential temperature and acceleration compensated pressure transducer.
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  16. Maheshwari, Dinesh, Diffractive light modulator with dynamically rotatable diffraction plane.
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  17. Trisnadi,Jahja I.; Carlisle,Clinton B.; Cejna,Vlastimil, Diffractive light modulator-based dynamic equalizer with integrated spectral monitor.
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  18. Wade,Richard A., Dual span absolute pressure sense die.
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  22. Miller, Gregory; Berger, Josef, Fiber optic transceiver.
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  23. Knechtel, Roy, Firm, insulating and electrically conducting connection of processed semiconductor wafers.
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  24. Kurtz, Anthony D.; Gardner, Robert, Force transducer with environmental protection.
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  25. Kurtz, Anthony D.; Ned, Alexander A., High accuracy, high temperature, redundant media protected differential transducers.
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  29. Filippelli,Albert R., High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point.
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  30. Guo, Shuwen, High temperature capacitive static/dynamic pressure sensors and methods of making the same.
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  31. Kurtz,Anthony D.; Ned,Alexander A.; Goodman,Scott J., High temperature interconnects for high temperature transducers.
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  36. Kurtz, Anthony D.; Landmann, Wolf S., High temperature transducer using SOI electronics.
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  37. Kurtz, Anthony D.; Landmann, Wolf S.; VanDeWeert, Joseph R.; Ned, Alexander A., High temperature transducer using SOI, silicon carbide or gallium nitride electronics.
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  38. Kurtz, Anthony D.; Landmann, Wolf S.; VanDeWeert, Joseph R.; Ned, Alexander A., High temperature transducer using SOI, silicon carbide or gallium nitride electronics.
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  39. Kurtz, Anthony D.; Ned, Alexander A.; Van DeWeert, Joseph, High temperature, high bandwidth pressure acquisition system.
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  40. Kurtz, Anthony D.; Ned, Alexander A.; VanDeWeert, Joseph R., High temperature, high bandwidth pressure acquisition system.
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  41. Kurtz, Anthony D.; Ned, Alexander A.; VanDeWeert, Joseph R., High temperature, high bandwidth pressure acquisition system.
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  42. Ned, Alexander; Stefanescu, Sorin; Goodman, Scott, High-temperature headers for sensing elements.
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  43. Ned, Alexander A.; Stefanescu, Sorin, High-temperature headers with ribbed components for stress-relieved hermetic sealing.
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  44. Hunter, James A., Integrated driver process flow.
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  45. Kurtz, Anthony D.; Van DeWeert, Joseph, Leadless alignment of a semiconductor chip.
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  46. Carlisle, Clinton B.; Trisnadi, Jahia I.; Hunter, James, Light modulator structure for producing high-contrast operation using zero-order light.
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  47. Kurtz,Anthony D.; Goodman,Scott, Low cost pressure sensor for measuring oxygen pressure.
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  48. Kurtz, Anthony D.; Kochman, Boaz; Shang, Tonghuo, Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures.
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  49. Kurtz, Anthony D.; Shang, Tonghuo; Kochman, Boaz, Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures.
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  50. Kurtz, Anthony D.; Shang, Tonghuo; Kochman, Boaz, Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures.
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  51. Kurtz,Anthony D.; Shang,Tonghuo; Kochman,Boaz, Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures.
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  52. Trisnadi,Jahja I.; Carlisle,Clinton B., MEMS interferometer-based reconfigurable optical add-and-drop multiplexor.
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  53. Rozgo, Paul, Media isolated pressure sensor.
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  54. Trisnadi, Jahja I.; Carlisle, Clinton B., Method and apparatus for dynamic equalization in wavelength division multiplexing.
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  55. de Groot, Wilhelmus; Maheshwari, Dinesh, Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices.
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  56. Kurtz,Anthony D.; Van DeWeert,Joseph, Method and apparatus for measuring knocking in internal combustion engines.
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  57. Kurtz, Anthony D.; Ned, Alexander, Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers.
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  58. Trisnadi, Jahja I., Method and apparatus for reducing laser speckle using polarization averaging.
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  59. Amm, David T., Method and device for modulating a light beam and having an improved gamma response.
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  60. Miller, Gregory D., Method for domain patterning in low coercive field ferroelectrics.
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  61. Guo, Shuwen; Eriksen, Odd Harald Steen; Childress, Kimiko J., Method for forming a transducer.
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  62. Eriksen, Odd Harald Steen; Childress, Kimiko J.; Guo, Shuwen, Method for making a transducer.
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  63. Kornegay, Kevin; Atwell, Andrew R.; Balseanu, Mihaela; Duster, Jon; Hailu, Eskinder; Li, Ce, Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry.
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  64. Kornegay,Kevin; Atwell,Andrew R.; Balseanu,Mihaela; Duster,Jon; Hailu,Eskinder; Li,Ce, Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry.
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  65. Shook, James Gill, Method of and apparatus for sealing an hermetic lid to a semiconductor die.
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  66. Leung, Omar S., Method of sealing a hermetic lid to a semiconductor die at an angle.
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  67. Trisnadi, Jahja I., Method, apparatus, and diffuser for reducing laser speckle.
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  68. Hunter,Jim; Amm,David; Gudeman,Christopher, Micro-structures with individually addressable ribbon pairs.
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  69. Gudeman, Christopher; Hunter, James; Yeh, Richard; Amm, David T., Micro-support structures.
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  70. Bruner, Mike, Microelectronic mechanical system and methods.
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  71. Bruner,Mike, Microelectronic mechanical system and methods.
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  72. Kurtz, Anthony D.; Ned, Alexander; Goodman, Scott, Mounting apparatus and method for accurately positioning and aligning a leadless semiconductor chip on an associated header.
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  73. Kurtz Anthony D. ; Gardner Robert, Oil-filled pressure transducer.
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  74. Shafaat, Syed Tariq; Carlisle, Clinton B.; Hartranft, Marc, Optical communication arrangement.
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  75. Alioshin, Paul; Corbin, Dave B.; Tomita, Akira; Corrigan, Robert W., Optical device arrays with optimized image resolution.
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  76. Maheshwari, Dinesh; Dueweke, Michael, PDL mitigation structure for diffractive MEMS and gratings.
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  77. Dueweke, Michael; Maheshwari, Dinesh; Gudernan, Christopher; Trisnadi, Jahja I., Patterned diffractive light modulator ribbon for PDL reduction.
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  78. Gudeman,Christopher; Leung,Omar; Hunter,James; Amm,David, Pre-deflected bias ribbons.
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  82. DeRosa, Louis; Gardner, Robert; VanDeWeert, Joseph R.; Hurst, Adam, Pressure sensor having a helmholtz resonator.
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  83. DeRosa, Louis; Gardner, Robert; VanDeWeert, Joseph; Hurst, Adam, Pressure sensor having a helmholtz resonator.
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  84. Kurtz,Anthony D., Pressure transducer for measuring low dynamic pressures in the presence of high static pressures.
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  85. Kurtz, Anthony D.; Goodman, Scott; Ned, Alexander A., Pressure transducer structures suitable for curved surfaces.
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  86. Kurtz, Anthony D.; Ned, Alexander A., Pressure transducer utilizing non-lead containing frit.
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  90. Hunter, James; Staker, Bryan, Reduced formation of asperities in contact micro-structures.
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