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Carrier head with a flexible membrane for a chemical mechanical polishing system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B24B-005/00
  • B24B-029/00
출원번호 US-0891548 (1997-07-11)
발명자 / 주소
  • Perlov Ilya
  • Gantvarg Eugene
  • Ko Sen-Hou
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Fish & Richardson
인용정보 피인용 횟수 : 115  인용 특허 : 26

초록 ▼

A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion sur

대표청구항 ▼

[ What is claimed is:] [1.] A carrier head for use in a chemical mechanical polishing system, comprising:a base; anda flexible member connected to the base to define a first chamber, a second chamber and a third chamber, a lower surface of the flexible member providing a substrate receiving surface

이 특허에 인용된 특허 (26)

  1. Jennings Bernard A. (Plot 53 Laezonia ; Transvaal ZAX), Abrasive tools.
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  3. Sherwood Michael T. (Fremont CA) Lee Harry Q. (Mountain View CA) Shendon Norm (San Carlos CA) Spektor Semyon (San Francisco CA), Carrier head design for a chemical mechanical polishing apparatus.
    상세보기
  4. Zuniga Steven M. ; Blumenkranz Stephen J., Carrier head design for a chemical mechanical polishing apparatus.
    상세보기
  5. Shendon Norman (San Carlos CA), Chemical mechanical polishing apparatus with improved carrier and method of use.
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  6. Shendon Norm (San Carlos CA), Chemical mechanical polishing apparatus with improved polishing control.
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  7. Bukhman Yefim (Scottsdale AZ), Distributed polishing head.
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  12. Jackson Paul David (Scottsdale AZ) Schultz Stephen Charles (Gilbert AZ), Pneumatic polishing head for CMP apparatus.
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  26. Karlsrud Chris E. (Chandler AZ) Van Woerkom Anthony G. (Chandler AZ) Odagiri Shigeru (Yokohama JPX) Nagahashi Isao (Fujisawa AZ JPX) Preston Spencer (Chandler AZ), Wafer polishing method and apparatus.
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이 특허를 인용한 특허 (115)

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  4. Cox, Zachary T., Automatic source code generation for computing probabilities of variables in belief networks.
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  6. Hou, Te-Chien; Jiang, Ching-Hong; Lin, Kuo-Yin; She, Ming-Shiuan; Lee, Shen-Nan; Tsai, Teng-Chun; Lu, Yung-Cheng, CMP polishing head design for improving removal rate uniformity.
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