초록 ▼

Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller ha

Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller has inputs coupled to the sensor system to receive the operating parameters, a programmable memory unit for storing a control program to compute an output control signal based on the operating parameters, and a control output coupled to a control input of the plasma generator. An external computer device, includes a monitor, an icon copying device for example, a mouse suitable for drag-and-drop operation, and a memory storing a suitable code-building program for generating a user-selected control program according to user-determined process requirements. Respective graphical icons are presented on the monitor and are selected and connected by use of the icon copying device to represent logic processing of the operational parameters, and the external computer device creates the corresponding user-selected control program. The user-selected control program is downloaded from the external computer device to the programmable memory of the pds controller, e.g., using standard connectors and cables.

대표청구항 ▼

[ We claim:] [1.] Plasma process control arrangement wherein a plasma generator means provides electrical power to a plasma chamber for conducting a plasma process at a controlled level, said electrical power having detectable operating parameters including voltage and current levels, and in which a

[ We claim:] [1.] Plasma process control arrangement wherein a plasma generator means provides electrical power to a plasma chamber for conducting a plasma process at a controlled level, said electrical power having detectable operating parameters including voltage and current levels, and in which a programmable detection system detects said operating parameters; said control arrangement comprising a programmable PDS controller including input means coupled to said programmable detection system to receive said operating parameters therefrom, a programmable memory unit for storing a control program to determine an output control signal based on said operating parameters, said control program defining said detection of said operating parameters, and a control output coupled to a control input of said plasma generator means; an external computer device including a monitor, an icon copying device, and a memory storing a suitable code-building program for generating a user-defined control program; and means for loading the user-defined control program from the external computer device to the programmable memory of said programmable PDS controller, said user-defined control program comprising means for modifying the operation of said programmable PDS controller by defining said detection of said operating parameters according to said user-defined process requirements.