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Surface-treated crucibles for improved zero dislocation performance 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-035/00
출원번호 US-0490465 (1995-06-14)
발명자 / 주소
  • Hansen Richard L.
  • Drafall Larry E.
  • McCutchan Robert M.
  • Holder John D.
  • Allen Leon A.
  • Shelley Robert D.
출원인 / 주소
  • MEMC Electronic Materials, Inc.
대리인 / 주소
    Senniger, Powers, Leavitt & Roedel
인용정보 피인용 횟수 : 61  인용 특허 : 15

초록

A crucible in which a semiconductor material is melted and held during a crystal growing process. The crucible includes a body of vitreous silica having a bottom wall and a sidewall formation extending up from the bottom wall and defining a cavity for holding the molten semiconductor material. The s

대표청구항

[ We claim:] [1.] A crucible in which a semiconductor material is melted and held during a crystal growing process, the crucible comprisinga body of vitreous silica having a bottom wall and a sidewall formation extending up from the bottom wall and defining a cavity for holding the molten semiconduc

이 특허에 인용된 특허 (15)

  1. Arai Yoshiaki (Omiya) Kida Michio (Omiya) Ono Naoki (Omiya) Sahira Kensho (Omiya JPX), Apparatus for process for growing crystals of semiconductor materials.
  2. Patrick William John (Poughkeepsie NY) Scilla Salvatore James (Marlboro NY) Westdorp Wolfgang Alfred (Hopewell Junction NY), Controlling the oxygen content of Czochralski process of silicon crystals by sandblasting silica vessel.
  3. Loxley Ted A. (Mentor OH) Wheaton Harold L. (Minerva OH), Cristobalite reinforcement of high silica glass.
  4. Davey Keith S. A. (Cambridge GB2) Ware Rowland M. (Cottenham GB2), Improvements in and relating to the growth of crystalline material.
  5. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  6. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  7. Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX), Manufacture of quartz glass crucible for use in the manufacture of single crystal silicon.
  8. Teach Eugene G. (El Cerrito CA), Meta-bis anilide derivatives and their utility as herbicides.
  9. Bihuniak Peter P. (Corning NY) Guile Donald L. (Horseheads NY), Method of enhancing the refractoriness of high purity fused silica.
  10. Bihuniak Peter P. (Corning NY) Guile Donald L. (Horseheads NY), Method of enhancing the refractoriness of high purity fused silica.
  11. Brning Rolf (Bruchkbel DEX) Habegger Friedhelm (Hammersbach DEX), Method of making quartz glass crucibles, and apparatus carrying out the method.
  12. van der Steen Gerardus H. A. M. (Eindhoven NLX) Van Hove Eddy F. C. (Eindhoven NLX), Method of producing doped quartz glass.
  13. Baumler ; Peter ; Hofer ; Gerhard ; Korner ; Tassilo ; Mohn ; Heinrich ; Seiler ; Karl ; Simmat ; Fritz ; Rau ; Karlheinz, Method of surface crystallizing quartz.
  14. Pastor Ricardo C. (Manhattan Beach CA) Gorre Luisa E. (Oxnard CA) Pastor Antonio C. (Santa Monica CA) Chew Remedios K. (Canoga Park CA), Process for surface conversion of vitreous silica to cristobalite.
  15. Mansmann ; Manfred, Thermally stable quartz glass.

이 특허를 인용한 특허 (61)

  1. Phillips Richard Joseph ; Keltner Steven Jack ; Holder John Davis, Barium doping of molten silicon for use in crystal growing process.
  2. Richard Joseph Phillips ; Steven Jack Keltner ; John Davis Holder, Barium doping of molten silicon for use in crystal growing process.
  3. Prest, Christopher D.; Scott, Matthew S.; Zadesky, Stephen P.; Stratton, Dermot J.; Poole, Joseph C., Cast core insert out of etchable material.
  4. Phillips, Richard J.; Kimbel, Steven L.; Deshpande, Aditya J.; Shi, Gang, Coated crucibles and methods for applying a coating to a crucible.
  5. Horioka, Yukichi; Sakuragi, Shiro, Coated silica crucible having a bubble-free layer, and method of producing the same.
  6. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Cold chamber die casting with melt crucible under vacuum environment.
  7. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Cold chamber die casting with melt crucible under vacuum environment.
  8. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Continuous amorphous feedstock skull melting.
  9. Sansegundo-Sanchez, Javier; Benavides-Rel, Xavier; Vales-Canle, Manuel; Tomas-Martinez, Maria, Cooled gas distribution plate, thermal bridge breaking system, and related methods.
  10. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Counter-gravity casting of hollow shapes.
  11. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot; Poole, Joseph; Scott, Matthew; Prest, Christopher, Counter-gravity casting of hollow shapes.
  12. Kemmochi, Katsuhiko; Ohama, Yasuo, Crucible having a doped upper wall portion and method for making the same.
  13. Kemmochi, Katsuhiko; Ohama, Yasuo, Crucible having a doped upper wall portion and method for making the same.
  14. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.
  15. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.
  16. McNulty, Thomas Francis; Pender, David Charles; Lou, Victor Lien-Kong; Giddings, Robert Arthur; Ahlgren, Frederic Francis, Fused quartz article having controlled devitrification.
  17. Adachi, Naoshi, Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same.
  18. O'Keeffe, Sean Timothy; Verreault, Adam A.; Jelbert, Glenton; Deming, Michael, Horizontal skull melt shot sleeve.
  19. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Inline melt control via RF power.
  20. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Inline melt control via RF power.
  21. Verreault, Adam A; O'Keeffe, Sean T.; Stevick, Joseph W, Manifold collar for distributing fluid through a cold crucible.
  22. Clark, Roger F.; Mauk, Michael G.; Hall, Robert B.; Barnett, Allen M., Method for purifying silicon.
  23. Schwertfeger, Fritz; Szillat, Holger; Frey, Christoph; Lambert, Ulrich; Frauenknecht, Axel, Method for the production of a silica glass crucible with crystalline regions from a porous silica glass green body.
  24. Korus, Gabriele; Laudahn, Hilmar; Arndt, Martin; Gertig, Udo, Method of producing a quartz glass crucible.
  25. Froehlich, Robert; Mixon, David, Methods and system for cooling a reaction effluent gas.
  26. Kemmochi, Katsuhiko; Togawa, Takayuki; Mosier, Robert; Spencer, Paul, Methods for making silica crucibles.
  27. Holder,John D.; Phillips,Richard J., Partially devitrified crucible.
  28. Holder, John Davis, Process for preparing a silicon melt.
  29. Holder, John D., Process for producing a silicon melt.
  30. John Davis Holder, Process for producing a silicon melt.
  31. Alleppey V. Hariharan ; Mohan Chandra ; Michael Costantini ; Yuepeng Wan, Protective layer for quartz crucibles used for silicon crystallization.
  32. Hansen, Richard Lee; Kircher, Theodore P.; Devanathan, Narsi, Quartz glass crucible and method for treating surface of quartz glass crucible.
  33. Ohama, Yasuo, Quartz glass crucible for silicon single crystal pulling operation and process for manufacturing the same.
  34. Froehlich, Robert; Fieselmann, Ben; Mixon, David; Tsuo, York, Reactor with silicide-coated metal surfaces.
  35. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  36. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  37. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  38. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  39. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  40. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  41. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  42. Kemmochi, Katsuhiko; Mosier, Robert; Spencer, Paul, Silica crucible with inner layer crystallizer and method.
  43. Fukui, Masanori; Kishi, Hiroshi, Silica glass crucible.
  44. Kemmochi,Katsuhiko; Mosier,Robert O.; Spencer,Paul G., Silica glass crucible.
  45. Tsuji, Yoshiyuki; Tsujimoto, Toshio, Silica glass crucible.
  46. Kemmochi,Katsuhiko; Ohama,Yasuo, Silica glass crucible with barium-doped inner wall.
  47. Kemmochi,Katsuhiko; Mosier,Robert; Ohama,Yasuo, Silica glass crucible with bubble-free and reduced bubble growth wall.
  48. Verreault, Adam A; O'Keeffe, Sean T.; Stevick, Joseph W, Slotted shot sleeve for induction melting of material.
  49. Richard Joseph Phillips ; Steven Jack Keltner ; John Davis Holder, Strontium doping of molten silicon for use in crystal growing process.
  50. Tsujimoto, Toshio; Tsuji, Yoshiyuki, Surface modification process of quartz glass crucible.
  51. Tsujimoto, Toshio; Tsuji, Yoshiyuki, Surface modified quartz glass crucible and its modification process.
  52. Tsujimoto, Toshio; Tsuji, Yoshiyuki, Surface modified quartz glass crucible, and its modification process.
  53. Bender, David L, System for continuous growing of monocrystalline silicon.
  54. Bender, David L., System for continuous growing of monocrystalline silicon.
  55. Waniuk, Theodore A.; Stevick, Joseph; O'Keeffe, Sean Timothy; Stratton, Dermot J.; Poole, Joseph C.; Scott, Matthew S.; Prest, Christopher D., Temperature regulated melt crucible for cold chamber die casting.
  56. Kang, John; Pham, Quoc Tran; Waniuk, Theodore Andrew; O'Keeffe, Sean Timothy; Stevick, Joseph W., Temperature regulated vessel.
  57. Verreault, Adam A.; O'Keeffe, Sean T.; Stevick, Joseph W.; Yahata, Brennan D., Unevenly spaced induction coil for molten alloy containment.
  58. Verreault, Adam A; O'Keeffe, Sean T.; Stevick, Joseph W; Yahata, Brennan D, Unevenly spaced induction coil for molten alloy containment.
  59. Sudo, Toshiaki; Kodama, Makiko; Kanda, Minoru; Kishi, Hiroshi, Vitreous silica crucible for pulling silicon single crystal and method of manufacturing the same.
  60. Sudo, Toshiaki; Sato, Masaru, Vitreous silica crucible having outer, intermediate, and inner layers.
  61. Sudo, Toshiaki; Kishi, Hiroshi, Vitreous silica crucible provided with mineralizer on its inner surface and method of manufacturing silicon ingot using same.
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