초록 ▼

A flow sensor which is used for measuring the flow rate of a gas is disclosed. The flow sensor comprises a flow tube for allowing a gas to be circulated therethrough, a resistance is arranged so as to go across the inside of the flow tube, and pressure ports arranged on a tubular wall of the flow tu

A flow sensor which is used for measuring the flow rate of a gas is disclosed. The flow sensor comprises a flow tube for allowing a gas to be circulated therethrough, a resistance is arranged so as to go across the inside of the flow tube, and pressure ports arranged on a tubular wall of the flow tube. The resistance includes a fixed resistance and a variable resistance. The fixed resistance is a block being fixed to a circumferential wall of the flow tube and closing part of a flow path of the flow tube. Parallel plates are arranged in the block so as to confront the two pressure ports, respectively, and so as to extend in parallel to the gas flowing direction. The two pressure ports are positioned within areas defined by the parallel plates, respectively. The variable resistance is an orifice membrane having a flap, an outer circumference of the membrane being fixed to an inner circumference of the flow tube, the flap forming an aperture in the middle of the membrane while being displaced in a direction of flow of the gas.

대표청구항 ▼

[ What is claimed is:] [1.] A flow sensor comprising:a flow tube for allowing a gas to be circulated therethrough;a first resistance member arranged across a diameter inside of said flow tube;a second resistance member arranged on only one portion, in a circumferential direction, of an inner wall of

[ What is claimed is:] [1.] A flow sensor comprising:a flow tube for allowing a gas to be circulated therethrough;a first resistance member arranged across a diameter inside of said flow tube;a second resistance member arranged on only one portion, in a circumferential direction, of an inner wall of said flow tube and partially extending into a flow path of said gas with said first resistance member; andpressure ports arranged on a wall of said flow tube and opened before and past said first and second resistance members respectively, wherein said flow sensor detects a differential pressure of said gas before and past said first and second resistance members;wherein said first resistance member is a variable resistance and said second resistances member is a fixed resistance; andwherein said fixed resistance member is a block secured to a circumferential wall of said flow tube, said fixed resistance member closing art of said flow path of said flow tube.