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Method of making compound semiconductor films and making related electronic devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
  • H01L-031/18
출원번호 US-0857665 (1997-05-16)
발명자 / 주소
  • Basol Bulent M.
  • Kapur Vijay K.
  • Halani Arvind T.
  • Leidholm Craig R.
  • Roe Robert A.
출원인 / 주소
  • International Solar Electric Technology, Inc.
대리인 / 주소
    Fulwider Patton Lee & Utecht, LLP
인용정보 피인용 횟수 : 154  인용 특허 : 12

초록

A method of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating the precursor film in a suitable atmosphere to form a film. The source material includes Group IB-IIIA alloy-containing particles havi

대표청구항

[ What is claimed is:] [1.] A method for forming a compound film, comprising the steps of:(a) preparing a source material including Group IB-IIIA alloy-containing particles having at least one Group IB-IIIA alloy phase, Group IB-IIIA alloys constituting greater than about 50 molar percent of the Gro

이 특허에 인용된 특허 (12)

  1. Tuttle John R. (Denver CO) Contreras Miguel A. (Golden CO) Noufi Rommel (Golden CO) Albin David S. (Denver CO), Enhanced quality thin film Cu(In,Ga)Se2 for semiconductor device applications by vapor-phase recrystalliza.
  2. Basol Bulent M. (Redondo Beach CA) Kapur Vijay K. (Northridge CA), Group I-III-VI2 semiconductor films for solar cell application.
  3. Ciszek Theodore F. (Evergreen CO), Large single crystal quaternary alloys of IB-IIIA-SE2 and methods of synthesizing the same.
  4. Ermer James H. (Los Angeles CA) Love Robert B. (Chatsworth CA), Method for forming Cu In Se2 films.
  5. Love Robert B. (Chatsworth CA) Choudary Uppala V. (Chatsworth CA), Method for forming photovoltaic cells employing multinary semiconductor films.
  6. Wada Takahiro (Katano JPX) Nishitani Mikihiko (Nara JPX) Negami Takayuki (Katano JPX), Method for preparing chalcopyrite-type compound.
  7. Suyama Naoki (Osaka JPX) Ueno Noriyuki (Nara JPX) Omura Kuniyoshi (Osaka JPX) Takada Hazime (Osaka JPX) Kita Yuutaro (Osaka JPX) Murozono Mikio (Osaka JPX), Method for production of copper indium diselenide.
  8. Noufi Rommel (Golden CO) Gabor Andrew M. (Boulder CO) Tuttle John R. (Denver CO) Tennant Andrew L. (Denver CO) Contreras Miguel A. (Golden CO) Albin David S. (Denver CO) Carapella Jeffrey J. (Evergre, Method of fabricating high-efficiency Cu(In,Ga)(SeS)2 thin films for solar cells.
  9. Gremion Francois (Meinier CHX) Issartel Jean-Paul (Cranves-Sales FRX) Mueller Klaus (Grand-Lancy CHX), Method of making the compound CuInSe2.
  10. Aramoto Tetsuya (Osaka JPX) Nakayama Nobuo (Hirakata JPX) Omura Kuniyoshi (Higashiosaka JPX) Murozono Mikio (Hirakata JPX), Method of manufacturing solar cell.
  11. Kapur Vijay K. (Northridge CA) Choudary Uppala V. (Chatsworth CA) Chu Alan K. P. (Granada Hills CA), Process of forming a compound semiconductive material.
  12. Bhattacharya Raghu Nath ; Noufi Rommel ; Wang Li, Production of films and powders for semiconductor device applications.

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