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Method for the combustion chemical vapor deposition of films and coatings 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
  • C23C-004/00
출원번호 US-0161571 (1998-09-28)
발명자 / 주소
  • Hunt Andrew T.
  • Cochran Joe K.
  • Carter William Brent
출원인 / 주소
  • Georgia Tech Research Corporation
대리인 / 주소
    Jones & Askew LLP
인용정보 피인용 횟수 : 39  인용 특허 : 14

초록

A method for applying coatings to substrates using combustion chemical vapor deposition by mixing together a reagent and a carrier solution to form a reagent mixture, igniting the reagent mixture to create a flame, or flowing the reagent mixture through a plasma torch, in which the reagent is at lea

대표청구항

[ What is claimed is:] [1.] A method for applying a thin film coating selected from the group consisting of a metal and an oxide to substrates using combustion chemical vapor deposition comprising the steps of:(a) providing a substrate having at least one surface to be coated;(b) selecting a reagent

이 특허에 인용된 특허 (14)

  1. Rabalais John W. (Houston TX) Kasi Srinandan R. (Houston TX), Chemically bonded diamond films and method for producing same.
  2. Snail Keith A. (Silver Spring MD), Flame or plasma synthesis of diamond under turbulent and transition flow conditions.
  3. Tarr Yul J. ; Benson Donald J. ; Hunter Gary L., Integrated fuel injector and ignitor assembly.
  4. Baney Ronald H. (Midland MI) Bergstrom Debora F. (Midland MI) Justice Bruce H. (Dearborn MI), Method for forming ceramic materials, including superconductors.
  5. Fukui Keitaro (Kamakura JPX) Nakamura Osamu (Tokyo JPX) Okayama Yasushi (Tokyo JPX) Tsunoda Atsushi (Kamifukuoka JPX), Method for forming oxide superconducting films with an ultrasonic wave sprayer.
  6. Sato Yoichiro (Tsukuba JPX) Kamo Mutsukazu (Tsukuba JPX) Hata Chiemi (Tachikawa JPX), Method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof.
  7. Aida Hiroshi (Kyoto JPX), Method for producing diamond films.
  8. Shioya Jun (Osaka JPX) Yamaguchi Yoichi (Osaka JPX) Mizoguchi Akira (Osaka JPX) Yoshida Noriyuki (Osaka JPX) Takahashi Kenichi (Osaka JPX) Miyazaki Kenji (Osaka JPX) Takano Satoshi (Osaka JPX) Hayash, Method for producing thin film of oxide superconductor.
  9. Lackey ; Jr. Walter J. (Marietta GA) Barefield E. Kent (Decatur GA) Carter William B. (Atlanta GA) Hanigofsky John A. (Smyrna GA) Hill David N. (Chamblee GA), Method for the rapid deposition with low vapor pressure reactants by chemical vapor deposition.
  10. Matsuno Shigeru (Amagasaki JPX) Kubo Yoshio (Amagasaki JPX) Yoshizaki Kiyoshi (Amagasaki JPX) Wakata Mitsunobu (Amagasaki JPX) Miyashita Syouji (Amagasaki JPX) Fujiwara Fumio (Amagasaki JPX), Plasma based method for production of superconductive oxide layers.
  11. Kimura Takafumi (Hiratsuka JPX) Yamawaki Hideki (Isehara JPX) Ikeda Kazuto (Atsugi JPX) Ihara Masaru (Chigasaki JPX), Process for chemical vapor deposition of superconductive oxide.
  12. Baney Ronald H. (Midland MI) Hirano Shin-ichi (Aichi JPX), Process for preparing ceramic superconductive substances.
  13. Kanai Masahiro (Tokyo JPX) Yamagami Atsushi (Kawasaki JPX), Process for the formation of a functional deposited film by hydrogen radical-assisted cvd method utilizing hydrogen gas.
  14. Hsu Hsyh-Min (Austin TX) Yee Ian Y. K. (Austin TX), Spray pyrolysis process for preparing superconductive films.

이 특허를 인용한 특허 (39)

  1. Bi, Xiangxin; Mosso, Ronald J.; Chiruvolu, Shivkumar; Kumar, Sujeet; Gardner, James T.; Lim, Seung M.; McGovern, William E., Apparatus for coating formation by light reactive deposition.
  2. Bi, Xiangxin; Mosso, Ronald J.; Chiruvolu, Shivkumar; Kumar, Sujeet; Gardner, James T.; Lim, Seung M.; McGovern, William E., Coating formation by reactive deposition.
  3. McLean, David D., Combustion deposition burner and/or related methods.
  4. Lewis, Mark A.; McLean, David D.; Frati, Maximo, Combustion deposition of metal oxide coatings deposited via infrared burners.
  5. Remington, Michael P., Combustion deposition using aqueous precursor solutions to deposit titanium dioxide coatings.
  6. Dalzell,William J.; Heffner,Kenneth H., Conformal coverings for electronic devices.
  7. Chiruvolu,Shivkumar; Chapin,Michael Edward, Dense coating formation by reactive deposition.
  8. McLean, David D.; Dear, Ryan L., Flame guard and exhaust system for large area combustion deposition line, and associated methods.
  9. Stark, Wendelin Jan; Pratsinis, Sotiris-Emmanuel; Maciejewski, Marek; Loher, Stefan Fridolin; Baiker, Alfons, Flame synthesis of metal salt nanoparticles, in particular calcium and phosphate comprising nanoparticles.
  10. Stark, Wendelin Jan; Pratsinis, Sotiris-Emmanuel; Maciejewski, Marek; Loher, Stefan Fridolin; Baiker, Alfons, Flame synthesis of metal salt nanoparticles, in particular calcium and phosphate comprising nanoparticles.
  11. Bi, Xiangxin; Lopez, Herman A.; Narasimha, Prasad; Euvrard, Eric; Mosso, Ronald J., High rate deposition for the formation of high quality optical coatings.
  12. Stark, Jan Wendelin; Pratsinis, Sotiris E., Metal delivery system for nanoparticle manufacture.
  13. Wang, Hai; Phares, Denis, Method for preparing electrically conducting materials.
  14. Smith, Alan; Eppstein, Jonathan A.; Messier, Bernadette; Novakovic, Zoran; McRae, Stuart, Method for transdermal delivery of permeant substances.
  15. Smith, Alan; Eppstein, Jonathan A.; Messier, Bernadette; Novakovic, Zoran; McRae, Stuart, Method for transdermal delivery of permeant substances.
  16. Kino, Hiroyuki; Ito, Nobuaki; Nishinaga, Yoshihiro, Method of firing magnetic cores.
  17. Eppstein, Jonathan A., Microporation of tissue for delivery of bioactive agents.
  18. Eppstein, Jonathan A., Microporation of tissue for delivery of bioactive agents.
  19. Sutorik,Anthony C.; Laine,Richard M.; Marchal,Julien; Johns,Tyrone; Hinklin,Thomas, Mixed-metal oxide particles by liquid feed flame spray pyrolysis of oxide precursors in oxygenated solvents.
  20. Wang, Hai; Phares, Denis, Multicomponent nanoparticle materials and process and apparatus therefor.
  21. Remington, Jr., Michael P., Nano-particle loaded metal oxide matrix coatings deposited via combustion deposition.
  22. Hunt, Andrew Tye; Campbell, Ian; Harris, Holly E., Portable dry nanocoating machine.
  23. Horne, Craig R.; McGovern, William E.; Lynch, Robert B.; Mosso, Ronald J., Reactive deposition for electrochemical cell production.
  24. Bernstein, Kerry; Goodnow, Kenneth J.; Ogilvie, Clarence R.; Woodruff, Charles S.; Ventrone, Sebastian T., Reactive metal optical security device and methods of fabrication and use.
  25. McLean, David D., Remote combustion deposition burner and/or related methods.
  26. Fairbourn,David C., Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings.
  27. Fairbourn, David C., Simple chemical vapor deposition systems for depositing multiple-metal aluminide coatings.
  28. Tang, Yin; Sutorik, Anthony C.; Nguyen, Long; Hinklin, Tom; Rhodes, William H.; Scerbak, David, Sintered polycrystalline terbium aluminum garnet and use thereof in magneto-optical devices.
  29. Tang,Yin; Sutorik,Anthony C.; Nguyen,Long; Hinklin,Tom; Rhodes,William H.; Scerbak,David, Sintered polycrystalline terbium aluminum garnet and use thereof in magneto-optical devices.
  30. Hoste, Serge; Persyn, Frans; Van Driessche, Isabel, Spraying method to form a thick coating and products obtained.
  31. Dalzell,William J., System and method for non-destructively determining thickness and uniformity of anti-tamper coatings.
  32. Eppstein,Jonathan; McRae,Stuart; Papp,Joseph, Transdermal drug delivery device, method of making same and method of using same.
  33. Eppstein,Jonathan; McRae,Stuart; Smith,Alan, Transdermal drug delivery patch system, method of making same and method of using same.
  34. Eppstein, Jonathan; McRae, Stuart, Transdermal integrated actuator device, methods of making and using same.
  35. Eppstein, Jonathan; McRae, Stuart, Transdermal integrated actuator device, methods of making and using same.
  36. Eppstein, Jonathan; McRae, Stuart, Transdermal integrated actuator device, methods of making and using same.
  37. McRae, Stuart; Bowerman, Wendy E.; Braun, Stephen Wilson; Spiehl, Regina; Messier, Bernadette; Farquhar, David; Henkel, Erin Koch; O'Leary, Jeremiah Peter; Fisher, Mark James; Kascak, Uros; Lantz, Loren J.; Novakovic, Zoran; Eppstein, Jonathan, Transdermal porator and patch system and method for using same.
  38. Messier, Bernadette; Novakovic, Zoran; O'Leary, Jeremiah Peter; Spiehl, Regina; Bowerman, Wendy E.; Braun, Stephen Wilson; Eppstein, Jonathan; Farquhar, David; Fisher, Mark James; Kascak, Uros; Henkel, Erin Koch; Lantz, Loren J.; McRae, Stuart, Transdermal porator and patch system and method for using same.
  39. Messier, Bernadette; Novakovic, Zoran; O'Leary, Jeremiah Peter; Spiehl, Regina; Bowerman, Wendy E.; Braun, Stephen Wilson; Eppstein, Jonathan; Farquhar, David; Fisher, Mark James; Kascak, Uros; Henkel, Erin Koch; Lantz, Loren J.; McRae, Stuart, Transdermal porator and patch system and method for using same.
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