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Beam homogenizer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G03H-001/00
출원번호 US-0160322 (1998-09-25)
발명자 / 주소
  • Kathman Alan D
  • Feldman Michael R.
출원인 / 주소
  • Digital Optics Corporation
대리인 / 주소
    Jones Volentine, L.L.P.
인용정보 피인용 횟수 : 23  인용 특허 : 20

초록

A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The h

대표청구항

[ We claim:] [1.] A diffractive element comprising:a computer-generated hologram comprising irregularly patterned diffractive fringes and having a phase-transmittance pattern in which a Fourier transform of the phase transmittance pattern is more uniform than a Fourier transform of a phase transmitt

이 특허에 인용된 특허 (20)

  1. Feldman Michael R. (Charlotte NC) Rowlette ; Sr. John R. (Hummelstown PA), Beam-homogenizer.
  2. Kathman Alan D. ; Feldman Michael R., Diffractive beam homogenizer having free-form fringes.
  3. Lewis Aaron (38 Woodcrest Ave. Ithaca NY 14850) Pinevsky Ilan (P.O. Box 29190 Jerusalem ILX 91261 ), Generating defined structures on materials using combined optical technologies for transforming the processing beam.
  4. Debesis John R. (Penfield NY), Hologon scanner with beam shaping stationary diffraction grating.
  5. Case, Steven K., Holographic method for producing desired wavefront transformations.
  6. Petersen Joel (Valley Village CA) Lerner Jeremy (Culver City CA), Homogenizer formed using coherent light and a holographic diffuser.
  7. Stanton Stuart (Bridgewater NJ) Gallatin Gregg (Newtown CT) Oskotsky Mark (Marmaroneck NY) Zernike Frits (Norwalk CT), Hybrid illumination system for use in photolithography.
  8. Bowen Terry P. (Etters PA) Manning Randy M. (New Cumberland PA) Roff Robert W. (Westfield NJ) Graham Bruce M. (Hummelstown PA), Laser diode connector assembly.
  9. Afian Viktor V. (ulitsa Sevaka ; 2 ; kv. 13 Erevan SUX) Vartanian Albert V. (ulitsa Aigestana ; 2 ; kv. 57 Erevan SUX) Martirosian Ruben G. (ulitsa Shinararneri ; 27 ; kv. 32 Erevan SUX) Strebkov Dmi, Light radiation concentrator and method of making the same.
  10. Fox Donald P. (2421 Jefferson Ave. Berkeley CA 94703), Metal arc flashlight.
  11. Veldkamp Wilfrid B. (Lexington MA), Method and apparatus for shaping electromagnetic beams.
  12. Hasman Erez (Givatayim ILX) Friesem Asher A. (Rehovot ILX), Method of optimizing holographic optical elements.
  13. Case Steven K. (St. Louis Park MN), Multi-faceted holographic optical element and methods of making and using same.
  14. Smith Ronald T. (Torrance CA), Multiplex grating holographic floodlit center high mounted stoplight.
  15. Kraft Heinz-Peter (Munich DEX), Optical component element.
  16. Yingst Stephen M. (Hummelstown PA) Briggs Robert C. (Newport PA) D\Ambrosia John F. (Harrisburg PA) Flickinger Steven L. (Hummelstown PA) Owens Steven P. (Grantville PA) Zeiders Jeffrey A. (Middletow, Optical transceiver package with insertable subassembly.
  17. Hasegawa Shinya (Kawasaki JPX) Kayashima Shigeo (Kawasaki JPX), Optimized design method for holographic optical element and apparatus using such holographic optical element.
  18. Rauch Russell B. (Pasadena CA) Harris Ellis D. (Claremont CA), Pair of binary diffraction optics for use in overfilled raster output scanning systems.
  19. Michaloski Paul F. (Rochester NY) Partlo William N. (Fairport NY), Partial coherence varier for microlithographic system.
  20. Feldman Michael R. (Charlotte) Welch W. Hudson (Charlotte) Morris James E. (Charlotte NC), Radically symmetric hologram and method of fabricating the same.

이 특허를 인용한 특허 (23)

  1. Hansen,Matthew E., Apparatus for optical beam shaping and associated methods.
  2. Hansen,Matthew E., Apparatus for optical beam shaping and diffusing and associated methods.
  3. Cameron, Colin D.; Cowling, Peter C., Computer generated hologram display system.
  4. Goto, Akihiro, DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRI.
  5. Tyminski, Jacek K., Enhanced illuminator for use in photolithographic systems.
  6. Howard,Richard T., Fiber coupled laser diodes with even illumination pattern.
  7. Zhao, Zhongquan; King, Brian Edward; Duffey, Thomas Patrick, Homogenization of light beam for spectral feature metrology.
  8. Hansen,Matthew E, Methods for optical beam shaping and diffusing.
  9. DeVoe, Robert J.; Leatherdale, Catherine A.; Mao, Guoping; Fleming, Patrick R.; Kalweit, Harvey W., Microfabrication of organic optical elements.
  10. DeVoe,Robert J.; DeMaster,Robert D.; Duerr,Brook F.; Kitchin,Jonathan P.; Vogel,Dennis E., Multicolor imaging using multiphoton photochemical processes.
  11. Fleming, Patrick R.; DeVoe, Robert J.; Leatherdale, Catherine A.; Ballen, Todd A.; Florczak, Jeffrey M., Multidirectional photoreactive absorption method.
  12. Fleming,Patrick R.; DeVoe,Robert J.; Leatherdale,Catherine A.; Ballen,Todd A.; Florczak,Jeffrey M., Multipass multiphoton absorption method and apparatus.
  13. DeVoe, Robert J.; Leatherdale, Catherine A.; Florczak, Jeffrey M.; Fleming, Patrick R.; Potts, John E., Multiphoton curing to provide encapsulated optical elements.
  14. DeVoe, Robert J.; Leatherdale, Catherine A.; Florczak, Jeffrey M.; Fleming, Patrick R.; Potts, John E., Multiphoton curing to provide encapsulated optical elements.
  15. DeVoe,Robert J.; Leatherdale,Catherine A.; Fleming,Patrick R.; Potts,John E.; Florczak,Jeffrey M., Multiphoton curing to provide encapsulated optical elements.
  16. DeVoe, Robert J., Multiphoton photosensitization system.
  17. DeVoe,Robert J., Multiphoton photosensitization system.
  18. Hanna James I., Optical beam shaper.
  19. Laudo, John S., Optical system for cell imaging.
  20. Taira, Kenji, Photodetector device and photodetection method as well as a microscope and an endoscope.
  21. Bentsen,James G.; DeVoe,Robert J.; Williams,Todd R., Process for producing microfluidic articles.
  22. Drinkwater, Kenneth John; Holmes, Brian William, Security device.
  23. Cameron,Colin D; Cowling,Peter C, Three dimensional display.
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