초록 ▼

The present invention provides improved apparatus and process for the dilution and delivery of both high-purity chemicals as well as slurry chemicals from one or more bulk sources to an end-user. The present system utilizes two or more metered vessels which are connected to bulk chemical sources via

The present invention provides improved apparatus and process for the dilution and delivery of both high-purity chemicals as well as slurry chemicals from one or more bulk sources to an end-user. The present system utilizes two or more metered vessels which are connected to bulk chemical sources via intake lines. Each metered vessel contains an adjustable, swingable angle pipe, which drains any excess chemical by gravity flow from the metered vessel so as to adjust the chemical amount to a predetermined desired level. As the chemicals exit the angle pipes, sensors located at the end of the angle pipes sense the chemical being discharged and trigger the feed pump and valve to shut off, whereby the excess chemicals will continue to drain out until the chemical levels reach the same level as the vent port of the pipe attached to the metered vessels. The chemicals are drawn into the metered vessels from the bulk sources via a feed pump or pressure mechanism. The chemicals are then motivated through dispense lines to the pressure tank vessel for mixing and subsequently being delivered to a storage vessel which, in the case of CMP, may be replaced by a plurality of small diameter vessels to reduce slurry particle agglomeration.

대표청구항 ▼

[ What is claimed:] [1.] An apparatus for precision mixing of chemicals from at least two bulk sources which comprises:at least two metered vessels for receiving a predetermined volume of the chemicals from the bulk sources;a swingable angle pipe comprising a first arm and a second arm perpendicular

[ What is claimed:] [1.] An apparatus for precision mixing of chemicals from at least two bulk sources which comprises:at least two metered vessels for receiving a predetermined volume of the chemicals from the bulk sources;a swingable angle pipe comprising a first arm and a second arm perpendicular to each other to form a right angle passageway therebetween wherein the swingable angle pipe is pivotally mounted through the first arm to an adjustable joint near a bottom side of each of the metered vessels such that the swingable angle pipe is so positioned that the height between the right angle passageway and the adjustable joint determines the predetermined volume to be received by the swingable angle pipe and the correspondent metered vessels;a mixing vessel for chemical mixing;a first bulk intake line providing fluid communication between a first bulk source and the first metered vessel;a second bulk intake line providing fluid communication between a second bulk source and the second metered vessel;a dispense line providing fluid communication between the metered vessel and the mixing vessel;a sensor attached at the end of the second arm of the swingable angle pipe to detect the flow of the chemicals through the right angle passageway to the second arm when the chemicals have reached the predetermined volume in the metered vessels so as to assure cessation of chemical flow by sending a shut-off signal to valves on the first and second bulk intake lines between the bulk sources and the metered vessels; andwherein the predetermined volume in the metered vessels is adjustable by changing the height between the right angle passageway and the adjustable joint through upward or downward swinging of the swingable angle pipe such that any fluids in excess of the predetermined volume will drain out by gravity flow through a opening of the second arm.