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Fluid valves having cantilevered blocking films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/02
출원번호 US-0004639 (1998-01-08)
발명자 / 주소
  • Biegelsen David K.
  • Jackson Warren B.
  • Cheung Patrick C. P.
출원인 / 주소
  • Xerox Corporation
인용정보 피인용 횟수 : 53  인용 특허 : 8

초록

A cantilever valve useful for paper handling applications is disclosed. The valve can be batch fabricated in two dimensional valve arrays, with each valve in the array being controlled by passive matrix addressing. Typically, each valve includes a valve housing having an aperture plate defining an a

대표청구항

[ We claim:] [1.] A cantilever valve for controlling fluid movement, comprising:a valve housing having an aperture plate defining an aperture therethrough and having an inner surface, and a port plate positioned in an opposed spaced apart relationship to the aperture plate, the port plate defining a

이 특허에 인용된 특허 (8)

  1. Tokisue Hiromitsu (Niihari JPX) Tsumaki Nobuo (Ushiku JPX) Koike Toshifumi (Niihari JPX), Apparatus for holding and/or conveying articles by fluid.
  2. Ateya Antoun I. (Rochester NY), Apparatus for supporting flexible members.
  3. Judge Robert L. (Poughkeepsie NY) Wutka Anthony D. (Burlington VT), Controls for semiconductor wafer orientor.
  4. Jackson Warren B. (San Francisco CA) Biegelsen David K. (Portola Valley CA) Swartz Lars-Erik (Sunnyvale CA) Berlin Andrew A. (Palo Alto CA) Apte Raj B. (Palo Alto CA) Sprague Robert A. (Saratoga CA), Flexible object handling system using feedback controlled air jets.
  5. Bachmann Bernd (Altenburg DDX) Kuss Peter (Dittsmannsdorf DDX) Schuhmann Frank (Altenburg DDX) Wllner Jrgen (Nobitz DDX), Method and apparatus for the positioning of textile surface configurations.
  6. Biegelsen David K. ; Cheung Patrick C. P. ; Berlin Andrew A. ; Jackson Warren B. ; Swartz Lars-Erik ; Apte Raj B. ; Bruce Richard H., Passively addressable fluid valves having S-shaped blocking films.
  7. Henn Manfred (Heidelberg DEX) Wehle Josef (Schwetzingen DEX), Sheet-guiding device.
  8. Shikida Mitsuhiro (Kokubunji JPX) Sato Kazuo (Tokyo JPX) Kawamura Yoshio (Kokubunji JPX) Tanaka Shinji (Ibaraki JPX) Horiuchi Yasuaki (Yono JPX) Koide Akira (Ibaraki JPX) Miyada Toshimitsu (Hachioji , Valve and semiconductor fabricating equipment using the same.

이 특허를 인용한 특허 (53)

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  3. Gealy, Dan; Weimer, Ronald A., Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers.
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  6. Derderian,Garo J., Apparatus and methods for plasma vapor deposition processes.
  7. Carpenter,Craig M.; Dando,Ross S.; Mardian,Allen P., Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces.
  8. Hatano, Osamu; Miyakura, Toshiaki; Iori, Shinya, Counter ejector and box former.
  9. Swartz, Lars E.; Biegelsen, David K., Flap structure for electrostatic or magnetic applications and method for making same.
  10. Potter, Michael D., High temperature embedded charge devices and methods thereof.
  11. Bouche, Guillaume, Integrated circuit cooling device.
  12. Kia Silverbrook AU, Liquid ejection device.
  13. Kawka, Paul Anthony; Walsh, Bradley Edward, Method and apparatus for transferring a discrete substrate.
  14. Potter,Michael D., Method for non-damaging charge injection and a system thereof.
  15. Potter,Michael D., Method for non-damaging charge injection and system thereof.
  16. Bouche, Guillaume, Method of forming a cooling device for an integrated circuit.
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  22. Carpenter,Craig M.; Dynka,Danny, Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers.
  23. Dando, Ross S.; Gealy, Dan, Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces.
  24. Dando, Ross S.; Gealy, Dan, Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces.
  25. Potter,Michael D., Methods for distributed electrode injection.
  26. Zheng, Lingyi A.; Doan, Trung T.; Breiner, Lyle D.; Ping, Er-Xuan; Beaman, Kevin L.; Weimer, Ronald A.; Basceri, Cem; Kubista, David J., Methods for forming small-scale capacitor structures.
  27. Potter,Michael D., Micro fluidic valves, agitators, and pumps and methods thereof.
  28. Potter,Michael D., Micro-electro-mechanical switch and a method of using and making thereof.
  29. Baillin, Xavier; Caplet, Stéphane; Hilt, Thierry, Microcavity structure and encapsulation structure for a microelectronic device.
  30. Goodwin-Johansson, Scott H.; McGuire, Gary E., Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods.
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  34. Tai, Yu-Chong; Yang, Xing; Grosjean, Charles; Wang, Xuan-Qi, Micromachined parylene membrane valve and pump.
  35. Schmitz, Volker; Grosse, Axel, Micromechanical component having a cap having a closure.
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  41. Potter,Michael D., Motion based, electrostatic power source and methods thereof.
  42. Mayerberg, II,Willson L.; White,Randall E., Non-contact aerodynamic diverter/stacker insertion system.
  43. Seeley,Charles Erklin; Saia,Richard Joseph; Kapusta,Christopher James; Najewicz,David Joseph; Zribi,Anis; Wu,Guanghua (George), Piezoelectric microvalve.
  44. Basceri, Cem; Sandhu, Gurtej S., Reactors having gas distributors and methods for depositing materials onto micro-device workpieces.
  45. Dando, Ross S., Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces.
  46. Miller, Matthew W.; Basceri, Cem, Reactors, systems and methods for depositing thin films onto microfeature workpieces.
  47. Potter,Michael D., Rotational motion based, electrostatic power source and methods thereof.
  48. Sarigiannis,Demetrius; Meng,Shuang; Derderian,Garo J., Systems and methods for depositing material onto microfeature workpieces in reaction chambers.
  49. Kubista, David J.; Doan, Trung T.; Breiner, Lyle D.; Weimer, Ronald A.; Beaman, Kevin L.; Ping, Er-Xuan; Zheng, Lingyi A.; Basceri, Cem, Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers.
  50. Buestgens, Burkhard; Georges, Suheel Roland, Temperature-compensated piezoelectric flexural transducer.
  51. David Kalman Biegelsen ; Lars-Erik Swartz, Tethered fluid valve apparatus.
  52. Yang, Shun, Vacuum suction adjustable transfer roller and film attachment method using the transfer roller.
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