초록 ▼

Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer shifting devices engage the wafers, simultaneously remove the engaged wafers during that cycle from the holdi

Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer shifting devices engage the wafers, simultaneously remove the engaged wafers during that cycle from the holding stations, shift the engaged wafers downstream relative to said holding stations and then simultaneously redeposit the wafers onto the holding stations. Thus, each wafer redeposited on a cycle of the wafer shifting devices is disposed at a holding station downstream from the holding station occupied by such wafer before that cycle of the shifting devices. Wafer supply and removal devices are provided for introducing and removing the wafers to and from the holding stations after they are treated. A method of handling wafers among a plurality of holding stations is also disclosed.

대표청구항 ▼

[ What is claimed is:] [1.] Wafer handling apparatus for cyclically shifting wafers introduced thereto and removed therefrom comprising:(a) a plurality of vertically arranged holding stations spaced apart from one another each comprising a support surface for supporting the wafers, said holding stat

[ What is claimed is:] [1.] Wafer handling apparatus for cyclically shifting wafers introduced thereto and removed therefrom comprising:(a) a plurality of vertically arranged holding stations spaced apart from one another each comprising a support surface for supporting the wafers, said holding stations being arranged in an upstream-to-downstream order with a first station at the upstream end of the order and a last station at the downstream end of the order;(b) a cyclically operative and substantially vertically movable wafer shifting arm for shifting the wafers held at each said holding station among said holding stations during each cycle of operation, said wafer shifting arm comprising vertically arranged wafer holding shelves spaced apart from one another to engage each wafer held at each of said holding stations;(c) control means for controlling said wafer shifting arm to simultaneously remove each wafer engaged during that cycle and simultaneously redeposit at least some of the wafers engaged during that cycle onto said holding stations such that each wafer redeposited on a said holding station during a cycle is disposed at one of said holding stations downstream from said holding station occupied by such wafer before that cycle; and(d) one or more wafer treatment stations for treating the wafers being shifted among said holding stations in accordance with a predetermined treatment process.