초록 ▼

A cassette for supporting substantially planar objects such as photomasks, glass plates or semiconductor wafers during processing. The cassette is composed of bars connected at each end to an endpiece. Arms which form part of the endpiece are hinged to permit the side bars of the cassette to move in

A cassette for supporting substantially planar objects such as photomasks, glass plates or semiconductor wafers during processing. The cassette is composed of bars connected at each end to an endpiece. Arms which form part of the endpiece are hinged to permit the side bars of the cassette to move inwardly and outwardly from one another when objects are inserted in the cassette. A bridge can connect an upper portion of the arms. The bridge can be used to lift the cassette and cause flexing of the cassette to ensure better retention while the cassette is being lifted.

대표청구항 ▼

[ What is claimed is:] [1.] A compliant cassette for holding and transporting at least one substantially planar object, said cassette comprising:two side bars having comb projections;a center bar substantially parallel with the side bars positioned below the side bars and at approximately an equal d

[ What is claimed is:] [1.] A compliant cassette for holding and transporting at least one substantially planar object, said cassette comprising:two side bars having comb projections;a center bar substantially parallel with the side bars positioned below the side bars and at approximately an equal distance between the side bars, the center bar also having comb projections; andtwo endpieces each comprising center bar-securing portions for securing the respective ends of the center bar, and two arms radiating from and hingedly attached to the center bar-securing portion, with distal portions of the two arms securing the respective ends of the side bars, the two arms deflectable to a clamping position in response to placement of a planar object into contact with the side bars, to engage the obiect.