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Growth of bulk single crystals of aluminum nitride 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-023/00
출원번호 US-0111413 (1998-07-07)
발명자 / 주소
  • Hunter Charles Eric
출원인 / 주소
  • Cree, Inc.
대리인 / 주소
    Faust
인용정보 피인용 횟수 : 46  인용 특허 : 15

초록

Bulk, low impurity aluminum nitride (AlN) single crystals are grown by sublimation or similar deposition techniques at growth rates greater than 0.1 mm/hr.

대표청구항 ▼

[ That which is claimed is:] [1.] A method of producing bulk single crystals of AlN at enhanced growth rates comprising:growing AlN by depositing vapor species containing Al and N on the growth surface of a seed crystal; whileproviding effusion of the growing crystal interface sufficient to grow AlN

이 특허에 인용된 특허 (15)

  1. Jasinski Thomas J. (Medford MA) Witt August F. (Winchester MA), Apparatus for growing crystals.
    상세보기
  2. Rutz, Richard F., Epitaxial crystal fabrication of SiC:AlN.
    상세보기
  3. Hunter Charles Eric, Growth of bulk single crystals of aluminum nitride.
    상세보기
  4. Schetzina Jan Frederick (Cary NC), Integrated heterostructures of Group III-V nitride semiconductor materials including epitaxial ohmic contact, non-nitrid.
    상세보기
  5. Suzuki Akira (Nara JPX) Furukawa Katsuki (Sakai JPX) Shigeta Mitsuhiro (Joyo JPX) Fujii Yoshihisa (Nara JPX), Light emitting diode.
    상세보기
  6. Vodakov Jury A. (prospekt Engelsa ; 69/1 ; kv. 35 Leningrad SU) Mokhov Evgeny N. (prospekt Energetikov ; 54 ; korpus 2 ; kv. 59 Leningrad SU), Method for epitaxial production of semiconductor silicon carbide utilizing a close-space sublimation deposition techniqu.
    상세보기
  7. Chyi Jen-Inn (3F ; No. 38 ; Lane 8 ; Gao-Shuang Road Ping-Chen ; Taoyuan Hsien TWX), Method for the growth of nitride based semiconductors and its apparatus.
    상세보기
  8. Suzuki Akira (Nara JPX) Furukawa Katsuki (Sakai JPX) Shigeta Mitsuhiro (Tenri JPX), Method of fabricating single-crystal substrates of silicon carbide.
    상세보기
  9. Nii Keita (Kyoto JPX), Method of manufacturing a hetero-junction bi-polar transistor.
    상세보기
  10. Furukawa Katsuki (Sakai JPX) Tajima Yoshimitsu (Nara JPX) Suzuki Akira (Nara JPX), Method of producing silicon-carbide single crystals by sublimation recrystallization process using a seed crystal.
    상세보기
  11. Kim Sung C. (Boise ID) Yu Chris C. (Boise ID) Doan Trung T. (Boise ID), Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering.
    상세보기
  12. Rutz Richard F. (Cold Spring NY), Process for producing electronic grade aluminum nitride films utilizing the reduction of aluminum oxide.
    상세보기
  13. Streetman, Ben G.; Mattord, Terry J.; Kesan, Vijay P.; Treetman, Ben G.; Mattord, Terry, Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction.
    상세보기
  14. Rutz Richard F. (Cold Spring NY), Structure containing epitaxial crystals on a substrate.
    상세보기
  15. Davis Robert F. (Raleigh NC) Carter ; Jr. Calvin H. (Raleigh NC) Hunter Charles E. (Durham NC), Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide.
    상세보기

이 특허를 인용한 특허 (46)

  1. Schujman, Sandra B.; Rao, Shailaja P.; Bondokov, Robert T.; Morgan, Kenneth E.; Slack, Glen A.; Schowalter, Leo J., Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them.
    상세보기
  2. Schujman, Sandra B.; Rao, Shailaja P.; Bondokov, Robert T.; Morgan, Kenneth E.; Slack, Glen A.; Schowalter, Leo J., Aluminum nitride bulk crystals having high transparency to untraviolet light and methods of forming them.
    상세보기
  3. Katou, Tomohisa; Nagai, Ichirou; Miura, Tomonori; Kamata, Hiroyuki, Apparatus for manufacturing aluminum nitride single crystal, method for manufacturing aluminum nitride single crystal, and aluminum nitride single crystal.
    상세보기
  4. Hunter Charles Eric, Bulk single crystals of aluminum nitride.
    상세보기
  5. Slack, Glen A.; Schujman, Sandra B., Deep-eutectic melt growth of nitride crystals.
    상세보기
  6. Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A., Defect reduction in seeded aluminum nitride crystal growth.
    상세보기
  7. Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A., Defect reduction in seeded aluminum nitride crystal growth.
    상세보기
  8. Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo J.; Stack, Glen A., Defect reduction in seeded aluminum nitride crystal growth.
    상세보기
  9. Bondokov, Robert T.; Morgan, Kenneth E.; Schowalter, Leo; Slack, Glen A., Defect reduction in seeded aluminum nitride crystal growth.
    상세보기
  10. Bondokov, Robert T.; Schowalter, Leo J.; Morgan, Kenneth; Slack, Glen A.; Rao, Shailaja P.; Gibb, Shawn Robert, Defect reduction in seeded aluminum nitride crystal growth.
    상세보기
  11. Slack, Glen A.; Schowalter, Leo J., Doped aluminum nitride crystals and methods of making them.
    상세보기
  12. Slack, Glen A.; Schowalter, Leo J., Doped aluminum nitride crystals and methods of making them.
    상세보기
  13. Slack, Glen A.; Schowalter, Leo J., Doped aluminum nitride crystals and methods of making them.
    상세보기
  14. Edmond, John Adam; Doverspike, Kathleen Marie; Kong, Hua-shuang; Bergmann, Michael John, Group III nitride LED with undoped cladding layer.
    상세보기
  15. Edmond, John Adam; Doverspike, Kathleen Marie; Kong, Hua-shuang; Bergmann, Michael John, Group III nitride LED with undoped cladding layer.
    상세보기
  16. Edmond, John Adam; Doverspike, Kathleen Marie; Kong, Hua-shuang; Bergmann, Michael John, Group III nitride LED with undoped cladding layer.
    상세보기
  17. Bondokov, Robert T.; Rao, Shailaja P.; Gibb, Shawn R.; Schowalter, Leo J., Growth of large aluminum nitride single crystals with thermal-gradient control.
    상세보기
  18. Bondokov, Robert T.; Rao, Shailaja P.; Gibb, Shawn Robert; Schowalter, Leo J., Growth of large aluminum nitride single crystals with thermal-gradient control.
    상세보기
  19. Koukitu, Akinori; Kumagai, Yoshinao; Nagashima, Toru; Kinoshita, Toru; Kubota, Yuki; Dalmau, Rafael F.; Xie, Jinqiao; Moody, Baxter F.; Schlesser, Raoul; Sitar, Zlatko, Highly transparent aluminum nitride single crystalline layers and devices made therefrom.
    상세보기
  20. Bondokov, Robert T.; Morgan, Kenneth; Slack, Glen A.; Schowalter, Leo J., Large aluminum nitride crystals with reduced defects and methods of making them.
    상세보기
  21. Bondokov, Robert; Morgan, Kenneth E.; Slack, Glen A.; Schowalter, Leo J., Large aluminum nitride crystals with reduced defects and methods of making them.
    상세보기
  22. Benvenuti, Giacomo; Halary-Wagner, Estelle; Amorosi, Simone; Hoffmann, Patrik, Large area deposition in high vacuum with high thickness uniformity.
    상세보기
  23. Cuomo, Jerome J.; Williams, N. Mark; Hanser, Andrew David; Carlson, Eric Porter; Thomas, Darin Taze, MIIIN based materials and methods and apparatus for producing same.
    상세보기
  24. Michael J. Manfra ; Loren N. Pfeiffer ; Kenneth W. West ; Yiu-Huen Wong, MOS transistor having aluminum nitride gate structure and method of manufacturing same.
    상세보기
  25. Wang, Shaoping, Method and apparatus for aluminum nitride monocrystal boule growth.
    상세보기
  26. Cuomo, Jerome J.; Williams, N. Mark; Hanser, Andrew David; Carlson, Eric Porter; Thomas, Darin Taze, Method and apparatus for producing MIIIN columns and MIIIN materials grown thereon.
    상세보기
  27. Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos, Method and apparatus for producing large, single-crystals of aluminum nitride.
    상세보기
  28. Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos, Method and apparatus for producing large, single-crystals of aluminum nitride.
    상세보기
  29. Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos, Method and apparatus for producing large, single-crystals of aluminum nitride.
    상세보기
  30. Schowalter, Leo J.; Slack, Glen A.; Rojo, J. Carlos; Bondokov, Robert T.; Morgan, Kenneth E.; Smart, Joseph A., Method and apparatus for producing large, single-crystals of aluminum nitride.
    상세보기
  31. Schowalter, Leo; Slack, Glen A.; Rojo, Juan Carlos; Bondokov, Robert T.; Morgan, Kenneth E.; Smart, Joseph A., Method and apparatus for producing large, single-crystals of aluminum nitride.
    상세보기
  32. Morgan, Kenneth E.; Schowalter, Leo J.; Slack, Glen A., Methods for controllable doping of aluminum nitride bulk crystals.
    상세보기
  33. Mueller, Stephan, Methods of fabricating silicon carbide crystals.
    상세보기
  34. Mueller,Stephan, Methods of fabricating silicon carbide crystals.
    상세보기
  35. Mueller,Stephan, Methods of fabricating silicon carbide crystals.
    상세보기
  36. Schowalter, Leo J.; Smart, Joseph A.; Liu, Shiwen; Morgan, Kenneth E.; Bondokov, Robert T.; Bettles, Timothy J.; Slack, Glen A., Nitride semiconductor heterostructures and related methods.
    상세보기
  37. Schowalter, Leo J.; Smart, Joseph A.; Liu, Shiwen; Morgan, Kenneth E.; Bondokov, Robert T.; Bettles, Timothy J.; Slack, Glen A., Nitride semiconductor heterostructures and related methods.
    상세보기
  38. Cuomo, Jerome J.; Williams, N. Mark, Non-thermionic sputter material transport device, methods of use, and materials produced thereby.
    상세보기
  39. Xie, Jinqiao; Moody, Baxter; Mita, Seiji, Optoelectronic devices incorporating single crystalline aluminum nitride substrate.
    상세보기
  40. Xie, Jinqiao; Moody, Baxter; Mita, Seiji, Optoelectronic devices incorporating single crystalline aluminum nitride substrate.
    상세보기
  41. Schowalter, Leo J.; Chen, Jianfeng; Grandusky, James R., Photon extraction from nitride ultraviolet light-emitting devices.
    상세보기
  42. Schowalter, Leo J.; Chen, Jianfeng; Grandusky, James R., Photon extraction from nitride ultraviolet light-emitting devices.
    상세보기
  43. Schowalter,Leo J.; Slack,Glen A., Powder metallurgy crucible for aluminum nitride crystal growth.
    상세보기
  44. Moody, Baxter; Mita, Seiji; Xie, Jinqiao, Power semiconductor devices incorporating single crystalline aluminum nitride substrate.
    상세보기
  45. Grandusky, James R.; Schowalter, Leo J.; Jamil, Muhammad; Mendrick, Mark C.; Gibb, Shawn R., Pseudomorphic electronic and optoelectronic devices having planar contacts.
    상세보기
  46. Schowalter, Leo J.; Smart, Joseph A.; Grandusky, James R.; Liu, Shiwen, Thick pseudomorphic nitride epitaxial layers.
    상세보기

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