초록 ▼

A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmi

A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.

대표청구항 ▼

[ We claim:] [1.] An excimer laser system comprising:a container for carrying a mixture of a noble gas and halogen within said container;a plurality of electrodes carried within said container, each of said plurality of electrodes having external connections external said container;a laser beam tran

[ We claim:] [1.] An excimer laser system comprising:a container for carrying a mixture of a noble gas and halogen within said container;a plurality of electrodes carried within said container, each of said plurality of electrodes having external connections external said container;a laser beam transmitting assembly carried by said container for transmitting a laser beam from said container:a base having a receiving compartment for said container; anda receptacle carried within said receiving compartment, said receptacle having electrical connections therein for ready receiving said container and for completing an electrical circuit with said external connections of said container.