초록

A bulk chemical delivery system having: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. The bulk chemical canister may have a capacity of 200 liters.

대표청구항 ▼

[ What is claimed is:] [12.] A bulk chemical supply system, comprising:a cabinet that houses a bulk chemical canister that is connected to a first supply valve manifold; at least one manifold box connected to the first supply manifold, wherein the at least one manifold box includes at least two outp

[ What is claimed is:] [12.] A bulk chemical supply system, comprising:a cabinet that houses a bulk chemical canister that is connected to a first supply valve manifold; at least one manifold box connected to the first supply manifold, wherein the at least one manifold box includes at least two output lines and wherein one of the at least two output lines is connected to at least one secondary canister that is connected to a second supply manifold, and that is housed in a secondary cabinet, wherein each manifold box includes at least two valves, wherein the output lines and the valves of each manifold box are independently connected to each other, and wherein the system contains chemical that is tetraethylorthosilicate, triethylphosphate, trimethyl phosphite, trimethyl borate, titanium tetrachloride, or a tantalum compound, wherein the chemical is 99.9999% or more free of trace metals.