초록 ▼

A beam profiler comprising: an intensity modifier constructed and arranged to separately modify the intensity profile of different subbeam portions of an initial beam to thereby create respective subbeams each having a respective predetermined modification; and a subbeam-directing optical system con

A beam profiler comprising: an intensity modifier constructed and arranged to separately modify the intensity profile of different subbeam portions of an initial beam to thereby create respective subbeams each having a respective predetermined modification; and a subbeam-directing optical system constructed and arranged to direct the multiple subbeams along respective subbeam beam paths that substantially overlap in an overlap plane, whereby, a resulting beam of radiation is created at the overlap plane that has an intensity profile equal to the optical incoherent summation of the predetermined intensity profiles of said overlapping subbeams. The intensity modifier preferably comprises an array of intensity-modifying profiling elements disposed across the initial beam each producing a corresponding subbeam.

대표청구항 ▼

[ What is claimed is:] [1.] An optical beam profiler for creating, from an initial beam of radiation, a resulting beam of radiation having a desired intensity profile, said profiler comprising;an intensity modifier including an array of intensity-modifying profiling elements each comprising a predet

[ What is claimed is:] [1.] An optical beam profiler for creating, from an initial beam of radiation, a resulting beam of radiation having a desired intensity profile, said profiler comprising;an intensity modifier including an array of intensity-modifying profiling elements each comprising a predetermined pattern of radiation transmissive and non-transmissive regions, said patterns determined in accordance with selected intensity-modifying functions, each intensity-modifying profiling element being disposed to independently modify and filter a different subbeam portion of the initial beam to thereby create respective intensity-modified subbeams each having a respective predetermined intensity profile so that overlapping of said respective intensity-modified subbeams in an overlap plane produces said desired intensity profile; andA subbeam-directing optical system constructed and arranged to direct said subbeams along respective subbeam paths that overlap in said overlap plane, said resulting beam of radiation being created at the overlap plane, its said desired intensity profile produced by overlapping said respective intensity-modified subbeams in an overlap plane, said overlapping of said respective intensity-modified subbeams resulting from superimposing said subbeams in said overlap plane, said desired intensity profile being equal to an optical incoherent summation of the modified intensity profiles of said overlapping subbeams, the intensity profile of said resulting beam being determined by the intensity modifying functions of said selected intensity-modifying profiling elements.