초록 ▼

The present invention provides a technique for making a sensing assembly for use in a mass flow controller. The technique includes providing separating terminals between windings on a sensor tube. The separating terminals allow secure and reliable electrical connections to be made to wire wound on t

The present invention provides a technique for making a sensing assembly for use in a mass flow controller. The technique includes providing separating terminals between windings on a sensor tube. The separating terminals allow secure and reliable electrical connections to be made to wire wound on the sensor tube, and act as standoffs that support the sensor tube about an insulative form.

대표청구항 ▼

[ What is claimed is:] [1.] A device for measuring the flow of gas, the device comprising:a sensor tube;a coil of wire, the wire having an end, the coil wound around the sensor tube;at least one terminal board, the sensor tube being disposed through the terminal board, the terminal board having at l

[ What is claimed is:] [1.] A device for measuring the flow of gas, the device comprising:a sensor tube;a coil of wire, the wire having an end, the coil wound around the sensor tube;at least one terminal board, the sensor tube being disposed through the terminal board, the terminal board having at least one electrode wherein the end of the wire is electrically coupled to the electrode; anda first half plate attached to a first end of the sensor tube and a second half plate attached to a second end of the sensor tube.