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특허 상세정보

Method and apparatus for in situ gas concentration measurement

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01N-021/00   
미국특허분류(USC) 356/440 ; 356/437
출원번호 US-0870704 (1997-06-06)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Fields and Johnson, P.C.
인용정보 피인용 횟수 : 61  인용 특허 : 42
초록

A method and apparatus for in situ measurement of the concentration of a gas with a frequency modulated tunable diode laser is disclosed. The sampling cell, which is mounted in the flow of gases to be measured, is a Herriott cell. Gas enters the sampling cell through sintered metal filters that prevent entrance of particulates. Signals from a sample detector and a null detector are compared to eliminate interference patterns from the laser optics. High accuracy dynamic calibration of the apparatus is also disclosed.

대표
청구항

[ What is claimed is:] [1.] Apparatus for measuring concentration of a gas comprising:a tunable diode laser, said laser being tuned to project a laser beam at the wavelength of a spectral feature of said gas, said laser beam being modulated;a sampling cavity having a first end and a second end, said first and second ends having opposed interior reflecting surfaces;a lens attached to said first end, said laser beam being projected onto said lens, said lens splitting said laser beam, deflecting a first surface reflection of said laser beam and projecting s...

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