초록 ▼

A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure mi

A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

대표청구항 ▼

[ What is claimed is:] [11.] An actuator membrane, comprising:a membrane structure having multiple layers, wherein said layers are stacked on top of each other in an offset manner, wherein each layer having two ends is connected to another layer at alternating ends forming discrete joints thereby cr

[ What is claimed is:] [11.] An actuator membrane, comprising:a membrane structure having multiple layers, wherein said layers are stacked on top of each other in an offset manner, wherein each layer having two ends is connected to another layer at alternating ends forming discrete joints thereby creating an offset, folded configuration; andwhen actuated, said membrane structure is capable of deflecting a certain vertical distance.