초록 ▼

A heating system and method used to maintain a fluid flowing through a component (such as a mass flow controller) within approximately a predetermined temperature range. The fluid flows through a cavity in the component. A heater element and a sensor are positioned within the body of the component a

A heating system and method used to maintain a fluid flowing through a component (such as a mass flow controller) within approximately a predetermined temperature range. The fluid flows through a cavity in the component. A heater element and a sensor are positioned within the body of the component and the heater element is coupled to a power source. The temperature sensor is electrically connected to a controller. The controller will receive an input indicative of the temperature, determine whether the input falls within a predetermined temperature range, and output a signal to the power source to adjust the power provided to the heater element as necessary in order to maintain the temperature within the predetermined temperature range.

대표청구항 ▼

[ What is claimed is:] [1.] A heater system with temperature feedback for use in a manufacturing process to maintain a fluid within approximately a predetermined temperature range, comprising:a component having a body with a cavity, wherein the fluid flows through the cavity;a heater element positio

[ What is claimed is:] [1.] A heater system with temperature feedback for use in a manufacturing process to maintain a fluid within approximately a predetermined temperature range, comprising:a component having a body with a cavity, wherein the fluid flows through the cavity;a heater element positioned within the component and coupled to a power source;a temperature sensor positioned within the body of the component;a controller electrically coupled to the temperature sensor to receive an input from the temperature sensor, determine whether the input falls within a predetermined temperature range, and to output a signal to the power source to adjust the power provided to the heater element from the power source in order to maintain the temperature of the fluid within the predetermined temperature range; andwherein the heater element is placed within a heater element cavity within the body of the component.