초록 ▼

A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating conf

A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures. Various features of the chamber configurations help increase the throughput of the system by enabling rapid heating and cooling of substrates and simultaneous evacuation and venting of the chamber, and help compensate for thermal losses near the substrate edges, thereby providing a more uniform temperature across the substrate.

대표청구항 ▼

[ What is claimed is:] [1.] A load lock chamber, comprising:a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber;a support mechanism disposed within the chamber; andat least one removable volume reducing element disposed within the chamber, wherein each

[ What is claimed is:] [1.] A load lock chamber, comprising:a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber;a support mechanism disposed within the chamber; andat least one removable volume reducing element disposed within the chamber, wherein each of the at least one volume reducing elements can be removed from the chamber and replaced with an apparatus for controlling a temperature of the substrate.