초록 ▼

A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) ove

A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (40) is coated in a sputtered dielectric layer (78) and then encapsulated in stainless steel or other metal cladding (80). A closure member (46) on the actuator (40) is registered to a valve seat (70) by actuating the actuator (40) to force the closure member (46) in a puddle of adhesive (86) against the valve seat (70) until the adhesive (86) cures.

대표청구항 ▼

[ What is claimed is:] [43.] A method of fabricating a valve actuator that has at least one piezoelectric device, comprising:coating a layer of metal substrate material on the piezoelectric device;coating a layer of dielectric material on the substrate material; andcoating a layer of metal cladding

[ What is claimed is:] [43.] A method of fabricating a valve actuator that has at least one piezoelectric device, comprising:coating a layer of metal substrate material on the piezoelectric device;coating a layer of dielectric material on the substrate material; andcoating a layer of metal cladding material, which is more corrosion resistant than the piezoelectric device, on the dielectric material.