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[미국특허] Compact planar motor having multiple degrees of freedom 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02K-041/00
  • H01L-021/00
출원번호 US-0135624 (1998-08-17)
발명자 / 주소
  • Hazelton Andrew J.
출원인 / 주소
  • Nikon Corporation
대리인 / 주소
    Skjerven, Morrill, MacPherson, Franklin and Friel
인용정보 피인용 횟수 : 35  인용 특허 : 49

초록 ▼

A planar motor provides essentially unlimited range of motion in six degrees of freedom to an associated stage, e.g. for photolithography, in either a moving magnet or a moving coil configuration. Moving magnet configurations eliminate cumbersome cables and hoses, and allow higher speed. The motor i

대표청구항 ▼

[ What is claimed is:] [16.] An apparatus comprising:a substantially planar plurality of magnetic poles which generate a magnetic field of periodic alternating polarity;a substantially planar coil array cooperating with said magnetic field, said coil array comprising a plurality of individual coils,

이 특허에 인용된 특허 (49) 인용/피인용 타임라인 분석

  1. Karube ; Yukuo, Brushless DC motor.
    상세보기
  2. Nakamura Yoshimitsu (Osaka JPX), Coil unit of coreless armature and method of manufacturing the same.
    상세보기
  3. Mihalko Emil S. (Lansdale PA), Coil/magnet structure for a brushless DC motor.
    상세보기
  4. Niimi Masami,JPX, D.C. Motor with primary and auxiliary magnetic poles.
    상세보기
  5. Dudley Tex Monroe (Palo Alto CA), Damping control for positioning apparatus.
    상세보기
  6. Takei Seiji (Kanagawa JPX), Direct current linear motor and a direct drive unit on which it is equipped.
    상세보기
  7. Takahashi, Yoshiteru; Ogawa, Masataka, Disc type brushless motor.
    상세보기
  8. Malsky Herbert (Belmont MA), Dynamoelectric machine having a large magnetic gap and flexible printed circuit phase winding.
    상세보기
  9. Mabuchi Kenichi (Tokyo JA) Tsuchimochi Yoshihisa (Ichikawa JA), Electric hand tool.
    상세보기
  10. Goof Sven K. L. (Gl. Strandvej 236B DK-3050 Humlebaek DKX) Hansen Jens S. (Hjortevaenget 501 DK-2980 Kokkedal DKX), Electric motor with rotational speed regulation.
    상세보기
  11. Trost David (Fairfield CT), Electro-magnetic alignment device.
    상세보기
  12. Au Wai-Ming W. (Essex Junction VT) Tong Minh H. (Essex Junction VT), Electrostatic discharge suppression circuit employing low-voltage triggering silicon-controlled rectifier.
    상세보기
  13. Pavoz Marcel (Nanterre CT FRX) Gagnon Ernest P. (Manchester CT), Elevator with linear motor drive assembly.
    상세보기
  14. Phillips Edward H. (Middletown CA), Gas bearing X-Y-q 상세보기
  • Chitayat Anwar (Northport NY), High efficiency linear motor.
    상세보기
  • Jacobs Fred (New York NY), High resolution piggyback linear motor design for placement systems and the like.
    상세보기
  • Alcon Andrew R. (7432 Yolanda Dr. Fort Worth TX 76112), Levitation device.
    상세보기
  • Buon Georges (166-41 Powells Cove Blvd. Flushing NY 11357), Linear D.C. motor with non-ferrous stator core.
    상세보기
  • Oishi Tetsuo (Ise JPX), Linear DC brushless motor.
    상세보기
  • Langley Lawrence W. (Christiansburg VA), Linear DC permanent magnet motor.
    상세보기
  • Takei Seiji (Kanagawa JPX), Linear encoder and a guide unit on which it is equipped.
    상세보기
  • Eastham John Frederick (Long Ditton EN) Laithwaite Eric Roberts (Long Ditton EN) Fellows Thomas George (Barnet EN) Bromilow David John English (Bottisham EN), Linear induction motors.
    상세보기
  • Itagaki Masato (Shimizu JPX) Nakayama Susumu (Shimizu JPX) Kikuchi Katsuaki (Tsuchiura JPX) Haeda Yosio (Yaizu JPX) Umehara Teruo (Hanyu JPX) Kitani Fumihiko (Shimizu JPX), Linear motor of moving-coil type.
    상세보기
  • Mohn Frank (London GB2), Linear motor powered pump unit.
    상세보기
  • Hoffman Brian D. (Somerville NJ) Pollack Steven H. (Washington Crossing PA) Smit Peter (Newton PA) Woolley John (Warrington PA), Linear motor suspension system.
    상세보기
  • Van Engelen Gerard (Eindhoven NLX), Linear motor within a positioning device.
    상세보기
  • Mihalko Emil S. (Lansdale PA), Low damping torque brushless D.C. motor.
    상세보기
  • Culp Gordon W. (Van Nuys CA), Magnetic actuator.
    상세보기
  • Trumper David L. (Concord NC), Magnetic positioning device.
    상세보기
  • Lender Robert J. (Weston CT), Methods of producing slotless and toothless wound stator.
    상세보기
  • von der Heide Johann (Schramberg DEX) Papst Georg F. (St. Georgen DEX) Mueller Rolf (St. Georgen DEX), Motor control mounting.
    상세보기
  • Chitayat Anwar (Northport NY), Positioning device for planar positioning.
    상세보기
  • Van Engelen Gerard (Eindhoven NLX) Bouwer Adrianus G. (Eindhoven NLX), Positioning device using Lorentz forces.
    상세보기
  • Williams Don W. (Van Wert OH), Rotational field sensor.
    상세보기
  • Hinds Walter E. (1358 Schuyler Rd. Beverly Hills CA 90210), Single plane orthogonally movable drive system.
    상세보기
  • Bertram Leo (Stolberg DEX) Schemmann Hugo (Schaesberg NLX), Single-phase synchronous motor comprising a two-pole permanent-magnet rotor.
    상세보기
  • Morinaga Shigeki (Hitachi JPX) Miyashita Kunio (Hitachi JPX) Takahashi Tadashi (Hitachi JPX) Maeda Takeo (Hitachi JPX) Yamashita Seizi (Katsuta JPX), Slotless brushless motor.
    상세보기
  • Phillips Edward H. (Middletown CA), Solid state commutated linear motor with an ironless multiphase armature.
    상세보기
  • Whellams Geoffrey E. (3 Spruce Ave. Greenstead ; Colchester ; Essex GB2), Squirrel cage induction motors.
    상세보기
  • Ohzeki Hisao,JPX, Stage construction incorporating magnetically levitated movable stage.
    상세보기
  • Kristen Reiner (Nurnberg DT) Liska Manfred (Nurnberg DT), Stator winding for a miniature brushless DC motor.
    상세보기
  • Laskaris, Evangelos T., Support method and structure for epoxy impregnated saddle-shaped superconducting windings.
    상세보기
  • Langley, Lawrence W.; Fisher, Robert L., Toroidally wound brushless DC motor.
    상세보기
  • Dahl Randy L. (Scottsdale AZ), Turbine alternator with a central clear optical path.
    상세보기
  • Asakawa, Teruo, Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus.
    상세보기
  • Denk Joseph (Manhattan Beach CA) Wuertz Kenneth L. (Torrance CA), Two pole permanent magnet rotor construction for toothless stator electrical machine.
    상세보기
  • Asakawa Teruo (Tokyo JPX), Two-dimensional positioning device.
    상세보기
  • Asakawa Teruo (Nirasaki JPX), Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus.
    상세보기
  • Jackson ; Jr. John T. (St. Paul OR), Wide air gap permanent magnet motors.
    상세보기

    • 이 특허를 인용한 특허 (35) 인용/피인용 타임라인 분석

    1. Nesch,Ivan N.; Morrison,Timothy I., Apparatus and method for precise angular positioning.
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    2. Crandall, Jonathan Christian, Devices and methods related to field-effect transistor structures for radio-frequency applications.
      상세보기
    3. Frissen, Petrus C.M.; Compter, Johan C.; Peijnenburg, Antonius T.A.; Loopstra, Erik R., Displacement device.
      상세보기
    4. Lu, Xiaodong, Displacement devices and methods and apparatus for detecting and estimating motion associated with same.
      상세보기
    5. Lu, Xiaodong, Displacement devices and methods for fabrication, use and control of same.
      상세보기
    6. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
      상세보기
    7. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
      상세보기
    8. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
      상세보기
    9. Thirunarayan Kumar, Nandakumar; Smith, James F., High performance linear motor and magnet assembly therefor.
      상세보기
    10. Thirunarayan Kumar,Nandakumar; Smith,James F., High performance linear motor and magnet assembly therefor.
      상세보기
    11. Thirunarayan, Nandakumar; Smith, James F., High performance linear motor and magnet assembly therefor.
      상세보기
    12. Thirunarayan, Nandakumar; Smith, James F., High performance linear motor and magnet assembly therefor.
      상세보기
    13. Thirunarayan,Nandakumar; Smith,James F., High performance linear motor and magnet assembly therefor.
      상세보기
    14. Smith, James F.; Thirunarayan, Nandakumar, High performance motor and magnet assembly therefor.
      상세보기
    15. Smith,James F.; Thirunarayan,Nandakumar, High performance motor and magnet assembly therefor.
      상세보기
    16. Schäffel, Christoph; Katzschmann, Michael; Mohr, Hans-Ulrich; Walenda, Carolin; Glöβ, Rainer; Rudolf, Christian, High-resolution positioning device.
      상세보기
    17. Hisatsugu, Shinsuke, Input device.
      상세보기
    18. Pelrine, Ronald E.; Myers, Gregory K.; Wong-Foy, Annjoe; Herson, James A.; Low, Thomas P., Levitated micro-manipulator system.
      상세보기
    19. Pelrine, Ronald E.; Myers, Gregory Kent; Wong-Foy, Annjoe; Herson, James A.; Low, Thomas P., Levitated micro-manipulator system.
      상세보기
    20. Pelrine, Ronald E.; Wong-Foy, Annjoe, Levitated-micro manipulator system.
      상세보기
    21. Pelrine, Ronald E.; Wong-Foy, Annjoe, Levitated-micro manipulator system.
      상세보기
    22. Cartier, Paul; Lebel, Martin; Dubé, Eric Martin, Linear motor door actuator.
      상세보기
    23. De Weerdt,Robrecht, Lithographic apparatus and device manufacturing method.
      상세보기
    24. Vreugdewater,Patricia; Cox,Henrikus Herman Marie; Hol,Sven Antoin Johan; Van Der Schoot,Harmen Klaas, Lithographic apparatus and device manufacturing method.
      상세보기
    25. Binnad, Michael B.; Yang, Pai-Hsueh, Method and apparatus to allow a plurality of stages to operate in close proximity.
      상세보기
    26. Lu, Xiaodong, Methods and systems for controllably moving multiple moveable stages in a displacement device.
      상세보기
    27. Van Der Burg, Richard Adrianus Johannes; Lomonova, Elena Andreevna; Meessen, Koen Joseph; Paulides, Johannes Jacobus Hubertus, Moving device as well as a component placement device provided with such a moving device.
      상세보기
    28. Michael Binnard, Planar motor with linear coil arrays.
      상세보기
    29. Michael Binnard, Planar motor with linear coil arrays.
      상세보기
    30. Crandall, Jonathan Christian, Radio-frequency switches having silicon-on-insulator field-effect transistors with reduced linear region resistance.
      상세보기
    31. Crandall, Jonathan Christian, Radio-frequency switches having silicon-on-insulator field-effect transistors with reduced linear region resistance.
      상세보기
    32. Bergmann, Lars B., Storage or conveying system.
      상세보기
    33. Binnard, Michael B., System and method to control planar motors.
      상세보기
    34. Coakley, Scott; Binnard, Michael B., Three axis linear actuator.
      상세보기
    35. Hazelton, Andrew J.; Novak, W. Thomas; Ebihara, Akimitsu, Wafer positioner with planar motor and mag-lev fine stage.
      상세보기

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