초록 ▼

A make-up air handler for supplying outside air to clean environments such as clean rooms in semiconductor fabrication facilities includes a flow passage through which the outside air is passed. At least one filter is disposed to filter the outside air passing through the flow passage. The make-up a

A make-up air handler for supplying outside air to clean environments such as clean rooms in semiconductor fabrication facilities includes a flow passage through which the outside air is passed. At least one filter is disposed to filter the outside air passing through the flow passage. The make-up air handler preferably includes all boron-free filters to prevent the introduction of boron into the outside air by the filters. The make-up air handler can include boron-free ULPA filters to provide highly clean boron-free outside air for supplying to clean environments. The make-up air handler can be operated in a normal manner at air velocities exceeding the rated velocities of the ULPA filters, without subjecting the ULPA filters to air velocities exceeding their ratings, due to the configuration and arrangement of the ULPA filters in the flow passage. Accordingly, highly clean outside air can be provided at normal volumetric flow rates without high energy losses associated with above-rated velocity air flows through the ULPA filters.

대표청구항 ▼

[ What is claimed is:] [1.] An air filtration system for supplying filtered air to a clean environment, comprising:a make-up air handler, including:a flow passage having an inlet end through which outside air is introduced into the flow passage and an outlet end through which the outside air is exha

[ What is claimed is:] [1.] An air filtration system for supplying filtered air to a clean environment, comprising:a make-up air handler, including:a flow passage having an inlet end through which outside air is introduced into the flow passage and an outlet end through which the outside air is exhausted from the flow passage; andat least one air filter disposed to remove particulate from the outside air passing through the flow passage, each air filter being composed of a boron-free filter material;wherein no boron is introduced into the outside air passing through the flow passage by the at least one filter; anda secondary air handler in communication with the make-up air handler, the secondary air handler filtering the outside air passed through the at least one air filter of the make-up air handler before supplying the outside air into the clean environment.