초록 ▼

A substrate processing system is provided that includes substrate processing vessels, a substrate queuing station, a substrate transfer device, and a processor. The processor, in communication with the processing vessels, the queuing station, and the transfer device, provides selectable single and m

A substrate processing system is provided that includes substrate processing vessels, a substrate queuing station, a substrate transfer device, and a processor. The processor, in communication with the processing vessels, the queuing station, and the transfer device, provides selectable single and multi-step processing of the substrates by accessing a process command for a given substrate corresponding to desired processing of the substrate.

대표청구항 ▼

[ What is claimed is:] [1.] A substrate surface processing system, comprising:a plurality of surface processing vessels each having an ingress and egress defining port that are arrayed about a spacial locus in such a way that the several ports thereof are accessible from a single location spaced fro

[ What is claimed is:] [1.] A substrate surface processing system, comprising:a plurality of surface processing vessels each having an ingress and egress defining port that are arrayed about a spacial locus in such a way that the several ports thereof are accessible from a single location spaced from the several ports;a substrate queuing station spaced with the plural vessels along the same spacial locus and adapted to contain a plurality of substrates, defining a substrate access port accessible from said single location;a plurality of valves individually coupled to corresponding ones of said plurality of surface processing vessel ingress and egress ports and to said substrate queuing station substrate access port;a transfer device disposed at said single location and cooperative with corresponding ones of said plurality of valves for moving substrates from and to said substrate access port of said queuing station from and to selected ones of said surface processing vessels through the associated one of said ingress and egress ports thereof; anda processor in communication with said vessels, said transfer mechanism, and said plurality of valves, providing selectable single and multi-step substrate surface processing of said plurality of substrates by accessing a process command for a given substrate corresponding to desired processing of said substrate.