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[미국특허] Gas-sensing semiconductor devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/72
출원번호 US-0341794 (1999-09-14)
우선권정보 GB-0000723 (1997-01-15)
국제출원번호 PCT/GB98/00100 (1998-01-13)
§371/§102 date 19990914 (19990914)
국제공개번호 WO-9832009 (1998-07-23)
발명자 / 주소
  • Gardner Julian,GBX
  • Udrea Florin,GBX
출원인 / 주소
  • University of Warwick, GBX
대리인 / 주소
    Renner, Otto, Boisselle & Sklar LLP
인용정보 피인용 횟수 : 64  인용 특허 : 2

초록 ▼

A gas-sensing semiconductor device 1 is fabricated on a silicon substrate 2 having a thin silicon oxide insulating layer 3 on one side and a thin silicon layer 4 on top of the insulating layer 3 using CMOS SOI technology. The silicon layer 4 may be in the form of an island surrounded by a silicon ox

대표청구항 ▼

[ What is claimed is:] [1.] A gas-sensing semiconductor device comprising a semiconductor substrate (2), a thin insulating layer (3) on one side of the substrate, and a thin semiconductor layer (4) on top of the thin insulating layer, wherein the device includes at least one sensing area in which th

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  1. Covington Arthur K. (Newcastle upon Tyne GB2) Sibbald Alastair (Whitley Bay GB2), Encapsulated chemoresponsive microelectronic device arrays.
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  2. Schmidt Helmut (Zellingen DEX) Hutter Frank (Wrzburg DEX) Haas Karl-Heinz (Theilheim DEX) Obermeier Ernst (Kaufbeuren DEX) Steger Ulrich (Munich DEX) Endres Hanns-Erik (Munich DEX) Drost Stephan (Mun, Sensors for selectively determining liquid-phase or gas-phase components using a heteropolysiloxane sensitive layer.
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이 특허를 인용한 특허 (64) 인용/피인용 타임라인 분석

  1. Briman, Mikhail; Bryant, Craig; Chang, Ying-Lan; Gabriel, Jean-Christophe P.; Gandhi, Shirpal C.; Johnson, Bradley N; Ouborg, Willem-Jan; Passmore, John Loren; Ramakrishnan, Kastooriranganathan; Skarupo, Sergei; Star, Alexander; Valcke, Christian, Ammonia nanosensors, and environmental control system.
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  2. Clark, Jr.,William F.; Nowak,Edward J., Bolometric on-chip temperature sensor.
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  3. Toyoda, Inao; Matsuhashi, Hajime; Asami, Kazushi, Capacitance type humidity sensor and manufacturing method of the same.
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  4. Tanida,Katsunori, Capacitive humidity sensor.
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  6. Amer Mohammad Khaled Samman ; Samuel Admassu Gebremariam ; Lajos Rimai, Combined combustible gas sensor and temperature detector.
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  7. Abraham-Fuchs, Klaus; Fleischer, Maximilian; Meixner, Hans; Rumpel, Eva; Simon, Elfriede, Device and method for the quantitative determination of nitrogen oxides in exhaled air and application thereof.
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  8. Dass, Ronald I.; Novak, James, Etch resistant gas sensor.
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  9. Yazawa, Yoshiaki; Watanabe, Kazuki; Kamahori, Masao; Kunimoto, Yukinori, Examination apparatus for biological sample and chemical sample.
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  10. Lee, Jong-Ho; Kim, Chang-Hee, FET type gas-sensitive device having horizontal floating gate.
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  11. Izawa, Kuniyuki; Yoshioka, Kenichi; Kitagawa, Chizumi, Gas detection apparatus and gas detection method.
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  12. Luebke, Ryan; Eddaoudi, Mohamed; Omran, Hesham; Belmabkhout, Youssef; Shekhah, Osama; Salama, Khaled N., Gas sensor.
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  13. Usagawa, Toshiyuki, Gas sensor.
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  14. Kamata, Koichiro, Gas sensor and method for manufacturing the gas sensor.
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  15. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Gas sensor materials and methods for preparation thereof.
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  16. Hunziker, Werner; Pustan, David; Braun, Stephen, Gas sensor package.
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  18. Santoruvo, Gaetano; Lo Priore, Stefano, Heating element for microfluidic and micromechanical applications.
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  19. Cummins, Timothy, Integrated CMOS porous sensor.
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  20. Cummins, Timothy, Integrated CMOS porous sensor.
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  21. Cummins, Timothy, Integrated CMOS porous sensor.
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  22. Cummins, Timothy, Integrated CMOS porous sensor having sensor electrodes formed with the interconnect conductors of a MOS circuit.
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  23. Cummins, Timothy, Integrated MOS gas or humidity sensor having a wireless transceiver.
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  24. Humbert, Aurelie; Daamen, Roel; Hoang, Viet Nguyen, Integrated circuit comprising a gas sensor.
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  25. Merz, Matthias, Integrated circuit with sensor and method of manufacturing such an integrated circuit.
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  26. Cummins, Timothy, Integrated electronic sensor.
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  27. Speer, Raymond; Cavanagh, Leon; Smith, Peter, Integrated gas sensor.
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  28. Radtkey, Ray; Joshi, Kanchan; Johnson, Bradley N.; Chang, Ying-Lan, Magnetic carbon nanotube based biodetection.
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  29. Toyoda,Inao; Suzuki,Yasutoshi, Membrane type gas sensor and method for manufacturing membrane type gas sensor.
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  30. Yun-Gi Kim KR, Method for fabricating a semiconductor memory device having silicon-on-insulator (SOI) structure.
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  31. Suzuki,Hiroshi; Sueoka,Kuniaki, Method for manufacturing a thin-film transistor structure.
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  32. Coronel, Philippe; Marty, Michel, Method for manufacturing an integrated circuit with fully depleted and partially depleted transistors.
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  33. Ko, Sang-Choon; Jun, Chi-Hoon; Pyo, Hyeon-Bong; Park, Seon-Hee, Method for manufacturing floating structure of microelectromechanical system.
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  34. Fix, Richard; Wolst, Oliver; Henneck, Stefan; Martin, Alexander; Le-Huu, Martin, Method for passivating a field-effect transistor.
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  35. Udrea,Florin; Amaratunga,Gehan A J, Method of forming a MOS-controllable power semiconductor device for use in an integrated circuit.
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  36. Seddon, Michael J.; Carney, Francis J., Method of manufacturing a semiconductor device having reduced on-state resistance and structure.
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  37. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Methods and materials for forming gas sensor structures.
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  38. Takulapalli, Bharath R., Nano structured field effect sensor and methods of forming and using same.
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  39. Bradley, Keith; Chang, Ying-Lan; Gabriel, Jean-Christophe P.; Passmore, John Loren; Skarupo, Sergei; Tu, Eugene; Valcke, Christian, Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices.
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  40. Star, Alexander; Wyatt, Jeffrey; Joshi, Vikram; Stetter, Joseph R.; Grüner, George, Nanoelectronic capnometer adaptor including a nanoelectric sensor selectively sensitive to at least one gaseous constituent of exhaled breath.
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  41. Tuller, Harry L.; Mlcak, Richard, P-n junction sensor.
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  42. Passmore, John Loren; Gabriel, Jean Christophe P.; Star, Alexander; Joshi, Vikram; Skarupo, Sergei, Remotely communicating, battery-powered nanostructure sensor devices.
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  43. Hyde, Paul A.; Nowak, Edward J., Self heating monitor for SiGe and SOI CMOS devices.
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  44. Hyde,Paul A.; Nowak,Edward J., Self heating monitor for SiGe and SOI CMOS devices.
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  45. Udrea, Florin; Amaratunga, Gehan A. J., Semiconductor device.
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  46. Udrea, Florin; Amaratunga, Gehan A. J., Semiconductor device and method of forming a semiconductor device.
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  47. Udrea, Florin; Amaratunga, Gehan A. J., Semiconductor device and method of forming a semiconductor device.
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  48. Udrea,Florin; Amaratunga,Gehan A. J., Semiconductor device and method of forming a semiconductor device.
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  49. Udrea,Florin; Amaratunga,Gehan A. J., Semiconductor device and method of forming a semiconductor device.
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  50. Johnson,Jerry W.; Piner,Edwin L.; Linthicum,Kevin J., Semiconductor device-based sensors.
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  51. Kim Yun-Gi,KRX, Semiconductor memory device having silicon-on-insulator (SOI) structure and method for fabricating thereof.
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  52. Migliorato, Piero; Bavidge, Nathan; Lowe, Christopher, Sensor cell.
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  56. Bryant, Craig; Chang, Ying-Lan; Gabriel, Jean-Christophe P.; Johnson, Bradley N.; Kuzmych, Oleksandr; Mickelson, William; Passmore, John Loren; Skarupo, Sergei; Valcke, Christian, Sensor having a thin-film inhibition layer.
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  57. Speer, Raymond; Cavanagh, Leon; Smith, Peter; Pavelka, John, Systems and methods for packaging integrated circuit gas sensor systems.
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  59. Takatori, Kenichi, Thin-film semiconductor device.
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  63. Holm-Kennedy, James, Ultrasensitive biosensors.
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  64. Holm-Kennedy, James, Ultrasensitive biosensors.
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