초록 ▼

A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open position and a closed position overlying a carrier port for sealing the interior of the carrier from t

A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open position and a closed position overlying a carrier port for sealing the interior of the carrier from the surrounding environment. The carrier is movable on a platform between withdrawn and advanced positions for delivering multiple wafers to a wafer receiving station. A plurality of spaced rack members support the wafers, each being aligned with an associated one of a plurality of spaced shelves on the wafer receiving station. The wafer receiving station may be located within a load lock defining a chamber having a substantially particle free environment and including a load lock port with a load lock door movable between a closed position overlying the load lock port and an open position spaced therefrom. A locking mechanism releasably locks the carrier door to the carrier. The carrier door drive mechanism includes a generally planar door opener movable between a lowered position and a raised position substantially coextensive with the carrier port. The door opener is also movable between a first position proximate the carrier port and a second position distant from the carrier port and a removal mechanism operates the locking mechanism to release the carrier door from the carrier port and supports the carrier door when the carrier door has been released from the carrier.

대표청구항 ▼

[ What is claimed is:] [1.] A system for batch loading semiconductor wafers comprising:a portable carrier for supporting and transporting in a substantially particle free environment a plurality of the wafers in substantially spaced relationship, said carrier having a carrier port for providing acce

[ What is claimed is:] [1.] A system for batch loading semiconductor wafers comprising:a portable carrier for supporting and transporting in a substantially particle free environment a plurality of the wafers in substantially spaced relationship, said carrier having a carrier port for providing access to the interior thereof;a carrier door on said carrier movable between a closed position overlying said carrier port for sealing the interior of said carrier from the surrounding environment and an open position spaced from said carrier port; anda platform for selectively supporting said carrier thereon, said carrier being movable on said platform between a withdrawn position distant from a wafer receiving station and an advanced position at the wafer receiving station for delivering the plurality of wafers thereto as a grouping;wherein said carrier has a plurality of spaced rack members for supporting the wafers thereon, each of said plurality of spaced rack members being aligned with an associated one of a plurality of spaced shelves on the wafer receiving station.